| 7323703 |
EUV light source |
I. Roger Oliver, William N. Partlo, Igor V. Fomenkov, Alexander I. Ershov, John Viatella +1 more |
2008-01-29 |
| 7309871 |
Collector for EUV light source |
— |
2007-12-18 |
| 7288778 |
Collector for EUV light source |
William N. Partio, Alexander I. Ershov, Igor V. Fomenkov |
2007-10-30 |
| 7217940 |
Collector for EUV light source |
William N. Partlo, John M. Algots, Gerry Blumenstock, Alexander I. Ershov, Igor V. Fomenkov +1 more |
2007-05-15 |
| 7193228 |
EUV light source optical elements |
Alexander I. Ershov, Timothy Dyer, Hugh R. Grinolds |
2007-03-20 |
| 7164144 |
EUV light source |
William N. Partlo, Alexander I. Ershov, Igor V. Fomenkov, David W. Myers, Ian Roger Oliver +2 more |
2007-01-16 |
| 7109503 |
Systems for protecting internal components of an EUV light source from plasma-generated debris |
Bjorn Hansson, Alexander N. Bykanov, Oleh Khodykin, Alexander I. Ershov, William N. Partlo |
2006-09-19 |
| 6972421 |
Extreme ultraviolet light source |
Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more |
2005-12-06 |
| 6815700 |
Plasma focus light source with improved pulse power system |
Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +1 more |
2004-11-09 |