Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Systems and methods for heating an EUV collector mirror

Systems and methods for heating an EUV collector mirror

US Patent 8198612 · Granted Jun 12, 2012

Estimated economic value: $5,972,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

EUV optical element having blister-resistant multilayer cap2022
Harsh environment optical element protection2019
Drive laser for EUV light source2017
Target material supply apparatus for an extreme ultraviolet light source2017
Target material supply apparatus for an extreme ultraviolet light source2016
EUV optics2014
EUV light source components and methods for producing, using and refurbishing sa2014
EUV optics2013
Drive laser for EUV light source2013
EUV light source components and methods for producing, using and refurbishing sa2012
Laser produced plasma EUV light source2011
EUV light source components and methods for producing, using and refurbishing sa2011