Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › EUV light source components and methods for producing, using and refurbishing same

EUV light source components and methods for producing, using and refurbishing same

US Patent 8314398 · Granted Nov 20, 2012

Estimated economic value: $33,148,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Guiding device and associated system2025
Laser system for source material conditioning in an EUV light source2025
Oxygen-loss resistant top coating for optical elements2025
System for monitoring a plasma2024
Rotating target for extreme ultraviolet source with liquid metal2024
Laser system for target metrology and alteration in an EUV light source2024
Prolonging optical element lifetime in an EUV lithography system2023
Guiding device and associated system2023
Method and apparatus for EUV mask inspection2023
Prolonging optical element lifetime in an EUV lithography system2022
Droplet generation for a laser produced plasma light source2022
System for monitoring a plasma2022