Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Droplet generation for a laser produced plasma light source

Droplet generation for a laser produced plasma light source

US Patent 11343899 · Granted May 24, 2022

Estimated economic value: $130,252,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for positioning optical isolator assembly with replaceable 2025
Confocal chromatic metrology for EUV source condition monitoring2025
Counterflow gas nozzle for contamination mitigation in extreme ultraviolet inspe2024
Rotating target for extreme ultraviolet source with liquid metal2024
Laser-sustained plasma lamps with graded concentration of hydroxyl radical2024
High bandwidth binary multi-leaf collimator design2024
Method and apparatus for EUV mask inspection2023
Method and apparatus for EUV mask inspection2023
Systems and methods for combined reflectometry and photoelectron spectroscopy2022
Laser produced plasma light source having a target material coated on a cylindri2022
Laser produced plasma light source having a target material coated on a cylindri2022
Laser produced plasma light source having a target material coated on a cylindri2022