Oxygen-loss resistant top coating for optical elements

Assignee

• Asml Netherlands B.V.

Inventors

• Yue Ma (156 patents)
• Marcus Adrianus Van De Kerkhof (104 patents)
• Qiushi Zhu (4 patents)
• Klaus Hummler (40 patents)
• Peter Matthew Mayer (1 patents)
• Kay Hoffmann (1 patents)
• Andrew David LaForge (13 patents)
• Igor V. Fomenkov (164 patents)
• Daniel John William Brown (22 patents)

View full patent text on Google Patents →