Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705688 | Laser system having a multi-stage amplifier and methods of use | David E. Spence, Bor-Chyuan Hwang, Thomas Sosnowski, Georg Wien, Victor Terpugoff +1 more | 2023-07-18 |
| 10784646 | Laser system having a multi-stage amplifier and methods of use | David E. Spence, Bor-Chyuan Hwang, Thomas Sosnowski, Georg Wein, Victor Terpugoff +1 more | 2020-09-22 |
| 7522650 | Gas discharge laser chamber improvements | William N. Partlo, Yoshiho Amada, James A. Carmichael, Timothy Dyer, Walter Dale Gillespie +6 more | 2009-04-21 |
| 7368741 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more | 2008-05-06 |
| 7217941 | Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source | Jerzy Hoffman, Ernesto L. Vargas | 2007-05-15 |
| 7132123 | High rep-rate laser with improved electrodes | Richard G. Morton, Timothy Dyer, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson +3 more | 2006-11-07 |
| 6972421 | Extreme ultraviolet light source | Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness +7 more | 2005-12-06 |
| 6937635 | High rep-rate laser with improved electrodes | Richard G. Morton, Timothy Dyer, Thomas D. Steiger, Richard C. Ujazdowski, Tom A. Watson +3 more | 2005-08-30 |
| 6914919 | Six to ten KHz, or greater gas discharge laser system | Tom A. Watson, Richard C. Ujazdowski, Alex P. Ivaschenko, Richard L. Sandstrom, Robert A. Shannon +6 more | 2005-07-05 |
| 6882674 | Four KHz gas discharge laser system | Christian J. Wittak, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher, David M. Johns +19 more | 2005-04-19 |
| 6765946 | Fan for gas discharge laser | William N. Partlo | 2004-07-20 |
| 6757316 | Four KHz gas discharge laser | Peter Clarke Newman, Thomas Patrick Duffey, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher +14 more | 2004-06-29 |