| RE42588 |
Control system for a two chamber gas discharge laser system |
John P. Fallon, Richard L. Sandstrom, William N. Partlo, Toshihiko Ishihara, John Meisner +4 more |
2011-08-02 |
| 7928417 |
LPP EUV light source drive laser system |
Alexander N. Bykanov, Oleh Khodykin, Igor V. Fomenkov |
2011-04-19 |
| 7885309 |
Laser system |
William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt, Richard L. Sandstrom +1 more |
2011-02-08 |
| 7872245 |
Systems and methods for target material delivery in a laser produced plasma EUV light source |
Georgiy O. Vaschenko, Alexander N. Bykanov, Norbert Bowering, David C. Brandt, Rodney D. Simmons +2 more |
2011-01-18 |
| 7852899 |
Timing control for two-chamber gas discharge laser system |
Richard M. Ness |
2010-12-14 |
| 7838854 |
Method and apparatus for EUV plasma source target delivery |
J. Martin Algots, Igor V. Fomenkov, William N. Partlo, Richard L. Sandstrom, Oscar Hemberg +2 more |
2010-11-23 |
| 7822092 |
Laser system |
William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt |
2010-10-26 |
| 7778302 |
Laser system |
William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt |
2010-08-17 |
| 7746913 |
Laser system |
William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt |
2010-06-29 |
| 7732793 |
Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source |
William Marx, Norbert Bowering, Bjorn Hansson, Oleh Khodykin, Igor V. Fomenkov |
2010-06-08 |
| 7671349 |
Laser produced plasma EUV light source |
Alexander N. Bykanov, Norbert Bowering, Igor V. Fomenkov, David C. Brandt, Oleh Khodykin +1 more |
2010-03-02 |
| 7655925 |
Gas management system for a laser-produced-plasma EUV light source |
Alexander N. Bykanov, Igor V. Fomenkov, David C. Brandt |
2010-02-02 |
| 7643528 |
Immersion lithography laser light source with pulse stretcher |
William N. Partlo, German E. Rylov, Igor V. Fomenkov, Daniel J. W. Brown, Christian J. Wittak +11 more |
2010-01-05 |
| 7630424 |
Laser system |
William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov |
2009-12-08 |
| 7598509 |
Laser produced plasma EUV light source |
William N. Partlo, Norbert Bowering, Bjorn Hansson |
2009-10-06 |
| 7596164 |
Control system for a two chamber gas discharge laser |
John P. Fallon, John Allen Rule, Robert N. Jacques, Jacob Lipcon, William N. Partlo +4 more |
2009-09-29 |
| 7567607 |
Very narrow band, two chamber, high rep-rate gas discharge laser system |
David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, William N. Partlo +10 more |
2009-07-28 |
| 7564888 |
High power excimer laser with a pulse stretcher |
James J. Ferrell, Thomas Hofmann, Daniel J. Reiley, Christopher R. Remen, Richard L. Sandstrom |
2009-07-21 |
| 7491954 |
Drive laser delivery systems for EUV light source |
Alexander N. Bykanov, Igor V. Fomenkov, Oleh Khodykin |
2009-02-17 |
| 7482609 |
LPP EUV light source drive laser system |
Alexander N. Bykanov, Oleh Khodykin, Igor V. Fomenkov |
2009-01-27 |
| 7449704 |
EUV light source |
Igor V. Fomenkov |
2008-11-11 |
| 7439530 |
LPP EUV light source drive laser system |
Alexander N. Bykanov, Oleh Khodykin, Igor V. Fomenkov |
2008-10-21 |
| 7411203 |
EUV light source |
Igor V. Fomenkov |
2008-08-12 |
| 7405416 |
Method and apparatus for EUV plasma source target delivery |
J. Martin Algots, Igor V. Fomenkov, William N. Partlo, Richard L. Sandstrom, Oscar Hemberg +2 more |
2008-07-29 |
| 7388220 |
EUV light source |
Igor V. Fomenkov |
2008-06-17 |