Issued Patents All Time
Showing 76–100 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7369597 | Laser output light pulse stretcher | Scot Smith, Alexei Lukashev | 2008-05-06 |
| 7365349 | EUV light source collector lifetime improvements | William N. Partlo, Igor V. Fomenkov, Oleh Khodykin | 2008-04-29 |
| 7323703 | EUV light source | I. Roger Oliver, William N. Partlo, Igor V. Fomenkov, Norbert Bowering, John Viatella +1 more | 2008-01-29 |
| 7317196 | LPP EUV light source | William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, David W. Myers | 2008-01-08 |
| 7288778 | Collector for EUV light source | William N. Partio, Norbert Bowering, Igor V. Fomenkov | 2007-10-30 |
| 7288777 | Collector for EUV light source | William N. Partlo, Igor V. Fomenkov | 2007-10-30 |
| 7277466 | High power gas discharge laser with helium purged line narrowing unit | William N. Partlo, Richard L. Sandstrom, Raymond F. Cybulski, Igor V. Fomenkov | 2007-10-02 |
| 7247870 | Systems for protecting internal components of an EUV light source from plasma-generated debris | William N. Partlo | 2007-07-24 |
| 7230964 | Lithography laser with beam delivery and beam pointing control | Plash P. Das, R. Kyle Webb, Marco Giovanardi, Gregory Francis, Huckleberry Dorn +3 more | 2007-06-12 |
| 7217940 | Collector for EUV light source | William N. Partlo, John M. Algots, Gerry Blumenstock, Norbert Bowering, Igor V. Fomenkov +1 more | 2007-05-15 |
| 7218661 | Line selected F2 two chamber laser system | David S. Knowles, Daniel J. W. Brown, Richard L. Sandstrom, German E. Rylov, Eckehard D. Onkels +8 more | 2007-05-15 |
| 7203216 | Timing control for two-chamber gas discharge laser system | Richard M. Ness | 2007-04-10 |
| 7196342 | Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source | William Marx | 2007-03-27 |
| 7193228 | EUV light source optical elements | Norbert Bowering, Timothy Dyer, Hugh R. Grinolds | 2007-03-20 |
| 7180083 | EUV light source collector erosion mitigation | William N. Partlo, Igor V. Fomenkov | 2007-02-20 |
| 7164144 | EUV light source | William N. Partlo, Norbert Bowering, Igor V. Fomenkov, David W. Myers, Ian Roger Oliver +2 more | 2007-01-16 |
| 7154928 | Laser output beam wavefront splitter for bandwidth spectrum control | Richard L. Sandstrom, Daniel J. W. Brown, Igor V. Fomenkov, William N. Partlo | 2006-12-26 |
| 7141806 | EUV light source collector erosion mitigation | William N. Partlo, Igor V. Fomenkov, David W. Myers, William Oldham | 2006-11-28 |
| 7109503 | Systems for protecting internal components of an EUV light source from plasma-generated debris | Norbert Bowering, Bjorn Hansson, Alexander N. Bykanov, Oleh Khodykin, William N. Partlo | 2006-09-19 |
| 7088758 | Relax gas discharge laser lithography light source | Richard L. Sandstrom, William N. Partlo, Daniel J. W. Brown, Thomas A. Yager, Robert Jay Rafac +1 more | 2006-08-08 |
| 7079564 | Control system for a two chamber gas discharge laser | John P. Fallon, John Allen Rule, Robert N. Jacques, Jacob Lipcon, William N. Partlo +4 more | 2006-07-18 |
| 7061961 | Very narrow band, two chamber, high rep-rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, William N. Partlo +10 more | 2006-06-13 |
| 7058107 | Line selected F2 two chamber laser system | David S. Knowles, Daniel J. W. Brown, Richard L. Sandstrom, German E. Rylov, Eckehard D. Onkels +8 more | 2006-06-06 |
| 7039086 | Control system for a two chamber gas discharge laser | John P. Fallon, John Allen Rule, Robert N. Jacques, Jacob Lipcon, Richard L. Sandstrom +5 more | 2006-05-02 |
| 7016388 | Laser lithography light source with beam delivery | Brian Klene, Palash P. Das, Steve Grove, Scot Smith, Xiaojiang Pan +1 more | 2006-03-21 |