Issued Patents All Time
Showing 126–150 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511703 | Protective overcoat for replicated diffraction gratings | Xiaojiang Pan, Richard G. Morton | 2003-01-28 |
| 6480275 | High resolution etalon-grating monochromator | Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov, Scott T. Smith | 2002-11-12 |
| 6381257 | Very narrow band injection seeded F2 lithography laser | Eckehard D. Onkels, Palash P. Das, William N. Partlo, Thomas Hofmann | 2002-04-30 |
| 6370174 | Injection seeded F2 lithography laser | Eckehard D. Onkels, Palash P. Das, Thomas Patrick Duffey, Richard L. Sandstrom, William N. Partlo | 2002-04-09 |
| 6359693 | Double pass double etalon spectrometer | Scott T. Smith, Jesse Buck | 2002-03-19 |
| 6320663 | Method and device for spectral measurements of laser beam | — | 2001-11-20 |
| 6243170 | Double pass etalon spectrometer | — | 2001-06-05 |
| 6240110 | Line narrowed F2 laser with etalon based output coupler | — | 2001-05-29 |
| 6229639 | Multiplexer for laser lithography | Robert G. Ozarski | 2001-05-08 |
| 6192064 | Narrow band laser with fine wavelength control | John M. Algots, Christopher A. Marchi, Frederick Erie, Jesse Buck, Palash P. Das +1 more | 2001-02-20 |
| 6137821 | Durable etalon based output coupler | — | 2000-10-24 |
| 6128323 | Reliable modular production quality narrow-band high REP rate excimer laser | David W. Myers, Herve A. Besaucele, Palash P. Das, Thomas Patrick Duffey, Igor V. Fomenkov +14 more | 2000-10-03 |
| 6094448 | Grating assembly with bi-directional bandwidth control | Igor V. Fomenkov, Frederick Erie | 2000-07-25 |
| 6061129 | Compact high resolution grating spectrometer | Gamaralalage G. Padmabandu, Palash P. Das | 2000-05-09 |
| 6028879 | Narrow band laser with etalon based output coupler | — | 2000-02-22 |
| 6014398 | Narrow band excimer laser with gas additive | Thomas Hofmann, Toshihiko Ishihara, Palash P. Das | 2000-01-11 |
| 5991324 | Reliable. modular, production quality narrow-band KRF excimer laser | David S. Knowles, James H. Azzola, Herve A. Besaucele, Palash P. Das, Igor V. Fomenkov +8 more | 1999-11-23 |
| 5982800 | Narrow band excimer laser | Toshihiko Ishihara, Thomas Hofmann, Palash P. Das | 1999-11-09 |
| 5978409 | Line narrowing apparatus with high transparency prism beam expander | Palash P. Das, Richard G. Morton | 1999-11-02 |
| 5970082 | Very narrow band laser | — | 1999-10-19 |
| 5917849 | Line narrowing device with double duty grating | — | 1999-06-29 |
| 5901163 | Narrow band laser with etalon based output coupler | — | 1999-05-04 |
| 5856991 | Very narrow band laser | — | 1999-01-05 |
| 5852627 | Laser with line narrowing output coupler | — | 1998-12-22 |
| 5835520 | Very narrow band KrF laser | Palash P. Das | 1998-11-10 |