Issued Patents All Time
Showing 101–125 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6985508 | Very narrow band, two chamber, high reprate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Meyers, William N. Partlo +10 more | 2006-01-10 |
| 6963595 | Automatic gas control system for a gas discharge laser | John Allen Rule, Richard Morton, Vladimir V. Fleurov, Fedor Trintchouk, Toshihiko Ishihara +1 more | 2005-11-08 |
| 6914919 | Six to ten KHz, or greater gas discharge laser system | Tom A. Watson, Richard C. Ujazdowski, Alex P. Ivaschenko, Richard L. Sandstrom, Robert A. Shannon +6 more | 2005-07-05 |
| 6904073 | High power deep ultraviolet laser with long life optics | Thomas A. Yager, William N. Partio, Richard L. Sandstrom, Xiaojiang Pan, John T. Melchior +11 more | 2005-06-07 |
| 6865210 | Timing control for two-chamber gas discharge laser system | Richard M. Ness | 2005-03-08 |
| 6801560 | Line selected F2 two chamber laser system | David S. Knowles, Daniel J. W. Brown, Richard L. Sandstrom, German E. Rylov, Eckehard D. Onkels +8 more | 2004-10-05 |
| 6778584 | High power gas discharge laser with helium purged line narrowing unit | William N. Partlo, Richard L. Sandstrom, Raymond F. Cybulski, Igor V. Fomenkov | 2004-08-17 |
| 6738410 | Line narrowed laser with bidirection beam expansion | William N. Partlo, Scott T. Smith | 2004-05-18 |
| 6735236 | High power gas discharge laser with line narrowing unit | Raymond F. Cybulski, Eckehard D. Onkels, Palash P. Das, Danilo K. Richardson, Jesse Buck | 2004-05-11 |
| 6713770 | High resolution spectral measurement device | Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov, Scott T. Smith, Daniel J. W. Brown | 2004-03-30 |
| 6704340 | Lithography laser system with in-place alignment tool | William N. Partlo, Palash P. Das, Laura S. Casas, Daniel J. W. Brown | 2004-03-09 |
| 6704339 | Lithography laser with beam delivery and beam pointing control | Leonard Lublin, David J. Warkentin, Palash P. Das, Brian Klene, R. Kyle Webb +4 more | 2004-03-09 |
| 6693939 | Laser lithography light source with beam delivery | Brian Klene, Palash P. Das, Steve Grove, Scot Smith, Xiaojiang Pan +1 more | 2004-02-17 |
| 6690704 | Control system for a two chamber gas discharge laser | John P. Fallon, Richard L. Sandstrom, William N. Partlo, Toshihiko Ishihara, John Meisner +4 more | 2004-02-10 |
| 6625191 | Very narrow band, two chamber, high rep rate gas discharge laser system | David S. Knowles, Daniel J. W. Brown, Herve A. Besaucele, David W. Myers, William N. Partlo +10 more | 2003-09-23 |
| 6603549 | Convolution method for measuring laser bandwidth | Steven F. Haas, Richard L. Sandstrom, Thomas Hofmann | 2003-08-05 |
| 6590922 | Injection seeded F2 laser with line selection and discrimination | Eckehard D. Onkels, Richard L. Sandstrom, Richard M. Ness, William N. Partlo, Choonghoon Oh | 2003-07-08 |
| 6567450 | Very narrow band, two chamber, high rep rate gas discharge laser system | David W. Myers, Herve A. Besaucele, William N. Partlo, Richard L. Sandstrom, Palash P. Das +7 more | 2003-05-20 |
| 6556612 | Line narrowed laser with spatial filter | Igor V. Fomenkov | 2003-04-29 |
| 6556600 | Injection seeded F2 laser with centerline wavelength control | Richard L. Sandstrom, Richard M. Ness, William N. Partlo, Eckehard D. Onkels, Choonghoon Oh | 2003-04-29 |
| 6553049 | ArF laser with low pulse energy and high rep rate | Herve A. Besaucele, Jean-Marc Hueber, Thomas Hofmann, Vladimir B. Fleurov | 2003-04-22 |
| 6549551 | Injection seeded laser with precise timing control | Richard M. Ness, Richard L. Sandstrom, William N. Partlo | 2003-04-15 |
| 6538737 | High resolution etalon-grating spectrometer | Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov, Daniel J. W. Brown | 2003-03-25 |
| 6535531 | Gas discharge laser with pulse multiplier | Scott T. Smith, Rajasekhar Rao | 2003-03-18 |
| 6529321 | Protective overcoat for replicated diffraction gratings | Xiaojiang Pan, Richard G. Morton | 2003-03-04 |