Issued Patents All Time
Showing 26–50 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9301382 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | David Robert Evans, Matthew R. Graham | 2016-03-29 |
| 9280053 | Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source | — | 2016-03-08 |
| 9119278 | System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output | Christopher C. Chrobak, William N. Partlo, Igor V. Fomenkov, James H. Crouch | 2015-08-25 |
| 9073098 | Light collector mirror cleaning | Silvia De Dea, Michael Varga, Robert L. Morse | 2015-07-07 |
| 9066412 | Systems and methods for cooling an optic | Robert L. Morse, William N. Partlo, Christopher Paul Pate | 2015-06-23 |
| 9000404 | Systems and methods for optics cleaning in an EUV light source | Alexander N. Bykanov, Silvia De Dea, Vladimir B. Fleurov, Igor V. Fomenkov, William N. Partlo | 2015-04-07 |
| 8908735 | Laser system | William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov | 2014-12-09 |
| 8901523 | Apparatus for protecting EUV optical elements | Jeremy Burke | 2014-12-02 |
| 8829478 | Drive laser delivery systems for EUV light source | — | 2014-09-09 |
| 8785892 | Laser-produced-plasma EUV light source | Igor V. Fomenkov | 2014-07-22 |
| 8653491 | System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output | William N. Partlo, Igor V. Fomenkov, Chris C. Chrobak, James H. Crouch | 2014-02-18 |
| 8633459 | Systems and methods for optics cleaning in an EUV light source | Alexander N. Bykanov, Silvia De Dea, Vladimir B. Fleurov, Igor V. Fomenkov, William N. Partlo | 2014-01-21 |
| 8604452 | Drive laser delivery systems for EUV light source | — | 2013-12-10 |
| 8519366 | Debris protection system having a magnetic field for an EUV light source | Alexander N. Bykanov | 2013-08-27 |
| 8514486 | Drive laser for EUV light source | Igor V. Fomenkov, Norbert Bowering, Jerzy Hoffman | 2013-08-20 |
| 8461560 | LPP EUV light source drive laser system | Alexander N. Bykanov, Oleh Khodykin, Igor V. Fomenkov | 2013-06-11 |
| 8304752 | EUV light producing system and method utilizing an alignment laser | Igor V. Fomenkov, William N. Partlo, Jason Paxton, Nam-hyong Kim, Jerzy Hoffman | 2012-11-06 |
| 8198615 | Gas management system for a laser-produced-plasma EUV light source | Alexander N. Bykanov, Igor V. Fomenkov, David C. Brandt | 2012-06-12 |
| 8170078 | Laser system | William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt, Richard L. Sandstrom +1 more | 2012-05-01 |
| 8158960 | Laser produced plasma EUV light source | Georgiy O. Vaschenko, Richard L. Sandstrom | 2012-04-17 |
| 8138487 | System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamber | Georgiy O. Vaschenko, William N. Partlo, Igor V. Fomenkov, Richard L. Sandstrom, David C. Brandt +1 more | 2012-03-20 |
| 8075732 | EUV collector debris management | William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov, William Oldham, William Marx +1 more | 2011-12-13 |
| 8035092 | Laser produced plasma EUV light source | Alexander N. Bykanov, Norbert Bowering, Igor V. Fomenkov, Oleh Khodykin | 2011-10-11 |
| 8017924 | Drive laser delivery systems for EUV light source | Alexander N. Bykanov, Igor V. Fomenkov | 2011-09-13 |
| 7999915 | Laser system | William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov, Robert A. Bergstedt, Ivan Lalovic | 2011-08-16 |