Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10064261 | Extreme ultraviolet light source | Yezheng Tao, John Tom Stewart, IV, Jordan Jur, Daniel J. W. Brown, Alexander Anthony Schafgans +1 more | 2018-08-28 |
| 10048199 | Metrology system for an extreme ultraviolet light source | Jesse Quinn Odle | 2018-08-14 |
| 9360600 | System and method for correcting the focus of a laser beam | Christopher Paul Pate | 2016-06-07 |
| 9357625 | Extreme ultraviolet light source | Yezheng Tao, John Tom Stewart, IV, Jordan Jur, Andrew David LaForge, Daniel J. W. Brown +2 more | 2016-05-31 |
| 8681427 | System and method for separating a main pulse and a pre-pulse beam from a laser source | Robert A. Bergstedt, Christopher Paul Pate | 2014-03-25 |