Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10794683 | Determining moving properties of a target in an extreme ultraviolet light source | Vahan Senekerimyan, Cèsar Fernandez-Espasa | 2020-10-06 |
| 10605588 | Determining moving properties of a target in an extreme ultraviolet light source | Vahan Senekerimyan, Cèsar Fernandez-Espasa | 2020-03-31 |
| 10429173 | Determining moving properties of a target in an extreme ultraviolet light source | Vahan Senekerimyan, Cèsar Fernandez-Espasa | 2019-10-01 |
| 10048199 | Metrology system for an extreme ultraviolet light source | Jason Michael Arcand | 2018-08-14 |
| 9778022 | Determining moving properties of a target in an extreme ultraviolet light source | Vahan Senekerimyan, Cèsar Fernandez-Espasa | 2017-10-03 |