Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12352704 | Metrology system for measuring edge of circular workpiece | Christopher Richard Hamner | 2025-07-08 |
| 11125967 | System and method for calibrating variable focal length lens system using calibration object with planar tilted pattern surface | Paul Gerard Gladnick, Dawn Alisa Keehnel | 2021-09-21 |
| 10812701 | High-speed tag lens assisted 3D metrology and extended depth-of-field imaging | Joseph Andrew Summers, Scott Ellis Hemmings, Mark Lawrence Delaney, Paul Gerard Gladnick, Bjorn Erik Bertil Jansson | 2020-10-20 |
| 10794683 | Determining moving properties of a target in an extreme ultraviolet light source | Jesse Quinn Odle, Cèsar Fernandez-Espasa | 2020-10-06 |
| 10605588 | Determining moving properties of a target in an extreme ultraviolet light source | Jesse Quinn Odle, Cèsar Fernandez-Espasa | 2020-03-31 |
| 10429173 | Determining moving properties of a target in an extreme ultraviolet light source | Jesse Quinn Odle, Cèsar Fernandez-Espasa | 2019-10-01 |
| 10210963 | Method of improving measurement of energy of extreme ultraviolet radiation generated in a chamber | Michael A. Purvis, Jie Ding | 2019-02-19 |
| 9778022 | Determining moving properties of a target in an extreme ultraviolet light source | Jesse Quinn Odle, Cèsar Fernandez-Espasa | 2017-10-03 |
| 9546901 | Minimizing grazing incidence reflections for reliable EUV power measurements having a light source comprising plural tubes with centerlines disposed between a radiation region and corresponding photodetector modules | Michael A. Purvis, Jie Ding | 2017-01-17 |
| 9341752 | Viewport protector for an extreme ultraviolet light source | — | 2016-05-17 |
| 9241395 | System and method for controlling droplet timing in an LPP EUV light source | Martijn Gerard Dominique Wehrens | 2016-01-19 |
| 8809823 | System and method for controlling droplet timing and steering in an LPP EUV light source | Martijn Gerard Dominique Wehrens | 2014-08-19 |
| 8000212 | Metrology for extreme ultraviolet light source | Nam-hyong Kim, Robert A. Bergstedt, Igor V. Fomenkov, William N. Partlo | 2011-08-16 |