Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9374882 | Final focus assembly for extreme ultraviolet light source | Robert A. Bergstedt, Paul Binun | 2016-06-21 |
| 9239268 | Calibration of photoelectromagnetic sensor in a laser source | Rong (Lauren) Liu, Robert Jay Rafac, David W. Myers, Robert A. Bergstedt | 2016-01-19 |
| 9239269 | Calibration of photoelectromagnetic sensor in a laser source | Rong (Lauren) Liu, Robert Jay Rafac, David W. Myers, Robert A. Bergstedt | 2016-01-19 |