| 12001144 |
Forming multiple aerial images in a single lithography exposure pass |
Joshua Jon Thornes, Gregory Allen Rechtsteiner |
2024-06-04 |
|
| 11747739 |
Method and apparatus for imaging using narrowed bandwidth |
Joshua Jon Thornes, Duan-Fu Stephen Hsu |
2023-09-05 |
$130,527,000 |
| 11526082 |
Forming multiple aerial images in a single lithography exposure pass |
Joshua Jon Thornes, Gregory Allen Rechtsteiner |
2022-12-13 |
|
| 10416566 |
Optimization of source and bandwidth for new and existing patterning devices |
Wei-An Hsieh, Tsann-Bim Chiou, Cheng-Hsien Hsieh |
2019-09-17 |
|
| 10268123 |
Wafer-based light source parameter control |
Eric Anders Mason, Omar Zurita, Gregory Allen Rechtsteiner |
2019-04-23 |
|
| 9997888 |
Control of a spectral feature of a pulsed light beam |
Eric Anders Mason, Joshua Jon Thornes |
2018-06-12 |
|
| 9989866 |
Wafer-based light source parameter control |
Eric Anders Mason, Omar Zurita, Gregory Allen Rechtsteiner |
2018-06-05 |
|
| 9835959 |
Controlling for wafer stage vibration |
Eric Anders Mason, Paulus Jacobus Maria VAN ADRICHEM |
2017-12-05 |
|
| 9229051 |
Integrated circuit with degradation monitoring |
Puneet Sharma, Matthew A. Thompson |
2016-01-05 |
|
| 8507187 |
Multi-exposure lithography employing a single anti-reflective coating layer |
Veeraraghavan S. Basker, Steven J. Holmes, David V. Horak |
2013-08-13 |
|
| 8119334 |
Method of making a semiconductor device using negative photoresist |
— |
2012-02-21 |
$5,308,000 |
| 7883829 |
Lithography for pitch reduction |
Steven J. Holmes, Xuefeng Hua |
2011-02-08 |
$4,016,000 |
| 7741221 |
Method of forming a semiconductor device having dummy features |
Ruiqi Tian, Mehul D. Shroff |
2010-06-22 |
|
| 6300035 |
Chemically amplified positive photoresists |
James W. Thackeray, Peter R. Hagerty, James F. Cameron, Wu-Song Huang, Ahmad D. Katnani |
2001-10-09 |
$29,916,000 |
| 6207353 |
Resist formulation which minimizes blistering during etching |
Michael D. Armacost, Tina J. Cotler-Wagner, Ronald A. DellaGuardia, David M. Dobuzinsky, Michael L. Passow +1 more |
2001-03-27 |
$29,796,000 |
| 5795701 |
Making of microlithographic structures with an underlayer film containing a thermolyzed azide compound |
James T. Fahey, Wayne M. Moreau, Ratnam Sooriyakumaran, Kevin M. Welsh |
1998-08-18 |
$11,146,000 |
| 5783361 |
Microlithographic structure with an underlayer film containing a thermolyzed azide compound |
James T. Fahey, Wayne M. Moreau, Ratnam Sooriyakumaran, Kevin M. Welsh |
1998-07-21 |
$12,143,000 |
| 5663036 |
Microlithographic structure with an underlayer film comprising a thermolyzed azide |
James T. Fahey, Wayne M. Moreau, Ratnam Sooriyakumaran, Kevin M. Welsh |
1997-09-02 |
$11,536,000 |
| 5644038 |
Quinone diazo compound containing non-metallic atom |
Ari Aviram, William R. Brunsvold, Daniel Bucca, David E. Seeger |
1997-07-01 |
$13,721,000 |
| 5567569 |
Process for producing a positive pattern utilizing naphtho quinone diazide compound having non-metallic atom directly bonded to the naphthalene ring |
Ari Aviram, William R. Brunsvold, Daniel Bucca, David E. Seeger |
1996-10-22 |
$11,193,000 |
| 5552256 |
Positive resist composition containing naphthoquinonediazide compound having non-metallic atom directly bonded to the naphthalene ring |
Ari Aviram, William R. Brunsvold, Daniel Bucca, David E. Seeger |
1996-09-03 |
$8,127,000 |
| 5322765 |
Dry developable photoresist compositions and method for use thereof |
Nicholas J. Clecak, Ranee W. Kwong, Leo L. Linehan, Scott A. MacDonald, Harbans S. Sachdev +2 more |
1994-06-21 |
$13,003,000 |
| 5296332 |
Crosslinkable aqueous developable photoresist compositions and method for use thereof |
Harbans S. Sachdev, Premlatha Jagannathan, Ahmad D. Katnani, Ranee W. Kwong, Leo L. Linehan +2 more |
1994-03-22 |
$7,732,000 |
| 5240812 |
Top coat for acid catalyzed resists |
Ranee W. Kwong, Richard J. Kvitek, Robert N. Lang, Christopher F. Lyons, Steve S. Miura +3 more |
1993-08-31 |
$6,793,000 |
| 5023164 |
Highly sensitive dry developable deep UV photoresist |
William R. Brunsvold, Philip Chiu, Dale M. Crockatt, Melvin Montgomery, Wayne M. Moreau |
1991-06-11 |
$12,432,000 |
