Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120103 | Intelligent/autonomous thermocline mapping and monitoring for marine and freshwater applications | Eli M. Dow, Michael R. Kelly, Harry R. Kolar | 2018-11-06 |
| 9575554 | Dynamic time sliced sensor sampling for reduced power consumption | Eli M. Dow, Michael R. Kelly, Harry R. Kolar | 2017-02-21 |
| 9395219 | Ring-based monitoring of sensor mesh networks | Eli M. Dow, Michael R. Kelly, Harry R. Kolar | 2016-07-19 |
| 7570174 | Real time alarm classification and method of use | Joseph Byrne, Harry D. Clark, Gary R. Moore, Yiheng Xu | 2009-08-04 |
| 6296717 | Regeneration of chemical mechanical polishing pads in-situ | Adam D. Ticknor, Karl E. Boggs, Kenneth M. Davis, William Francis Landers | 2001-10-02 |
| 6268226 | Reactive ion etch loading measurement technique | David Angell, Stuart M. Burns, Waldemar Walter Kocon | 2001-07-31 |
| 6207353 | Resist formulation which minimizes blistering during etching | Michael D. Armacost, Willard E. Conley, Tina J. Cotler-Wagner, Ronald A. DellaGuardia, David M. Dobuzinsky +1 more | 2001-03-27 |
| 6102776 | Apparatus and method for controlling polishing of integrated circuit substrates | Karl E. Boggs, Kenneth M. Davis, William Francis Landers, Robert M. Merkling, Jr., Jeremy K. Stephens | 2000-08-15 |
| 5811357 | Process of etching an oxide layer | Michael D. Armacost, Tina Wagner, Dominic J. Schepis, Matthew Sendelbach, William C. Wille | 1998-09-22 |
| 5534066 | Fluid delivery apparatus having an infrared feedline sensor | James A. O'Neill, Tina J. Cotler, Jonathan D. Chapple-Sokol, Richard A. Conti, Jyothi Singh | 1996-07-09 |
| 5492718 | Fluid delivery apparatus and method having an infrared feedline sensor | James A. O'Neill, Tina J. Cotler, Jonathan D. Chapple-Sokol, Richard A. Conti, Jyothi Singh | 1996-02-20 |
| 5308414 | Method and apparatus for optical emission end point detection in plasma etching processes | James A. O'Neill, Jyothi Singh | 1994-05-03 |