Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE46427 | Antioxidants for post-CMP cleaning formulations | David Angst, Peng Zhang, Jeffrey A. Barnes, Prerna Sonthalia, Emanuel I. Cooper | 2017-06-06 |
| 9528078 | Antioxidants for post-CMP cleaning formulations | David Angst, Peng Zhang, Jeffrey A. Barnes, Prerna Sonthalia, Emanuel I. Cooper | 2016-12-27 |
| 9522773 | Substantially rigid collapsible liner and flexible gusseted or non-gusseted liners and methods of manufacturing the same and methods for limiting choke-off in liners | Glenn M. Tom, Thomas H. Baum, Matthew Kusz, Joseph P. Menning, Greg Nelson +4 more | 2016-12-20 |
| 9132412 | Component for solar adsorption refrigeration system and method of making such component | J. Donald Carruthers, Luping Wang, Shaun M. Wilson, Jose I. Arno, Paul J. Marganski +5 more | 2015-09-15 |
| 9074170 | Copper cleaning and protection formulations | Jeffrey A. Barnes, Brian L. Benac, Lin Feng, Jun Liu, Melissa A. Petruska +2 more | 2015-07-07 |
| 9074169 | Lithographic tool in situ clean formulations | Tianniu Chen, Steven M. Bilodeau, Ping Jiang, Michael B. Korzenski, George Mirth +1 more | 2015-07-07 |
| 8685909 | Antioxidants for post-CMP cleaning formulations | David Angst, Peng Zhang, Jeffrey A. Barnes, Prerna Sonthalia, Emanuel I. Cooper | 2014-04-01 |
| 8618036 | Aqueous cerium-containing solution having an extended bath lifetime for removing mask material | Ali Afzali-Ardakani, John A. Fitzsimmons, Nicholas C. M. Fuller, Mahmoud Khojasteh, Jennifer V. Muncy +4 more | 2013-12-31 |
| 8539781 | Component for solar adsorption refrigeration system and method of making such component | J. Donald Carruthers, Luping Wang, Shaun M. Wilson, Jose I. Arno, Paul J. Marganski +5 more | 2013-09-24 |
| 8304344 | High throughput chemical mechanical polishing composition for metal film planarization | Michael S. Darsillo, Peter Wrschka, James Welch | 2012-11-06 |
| 8236695 | Method of passivating chemical mechanical polishing compositions for copper film planarization processes | Jun Liu, Mackenzie King, Michael S. Darsillo, Jeffrey F. Roeder, Peter Wrschka +1 more | 2012-08-07 |
| 7736405 | Chemical mechanical polishing compositions for copper and associated materials and method of using same | Michael S. Darsillo, Peter Wrschka | 2010-06-15 |
| 7361603 | Passivative chemical mechanical polishing composition for copper film planarization | Jun Liu, Mackenzie King, Michael S. Darsillo, Jeffrey F. Roeder, Thomas H. Baum | 2008-04-22 |
| 7300601 | Passivative chemical mechanical polishing composition for copper film planarization | Jun Liu, Peter Wrschka, David Bernhard, Mackenzie King, Michael S. Darsillo | 2007-11-27 |
| 6857434 | CMP slurry additive for foreign matter detection | Kwong Hon Wong, Raphael Mitchell, Uldis A. Ziemins | 2005-02-22 |
| 6325696 | Piezo-actuated CMP carrier | Kenneth M. Davis, William Francis Landers, Michael F. Lofaro, Adam D. Ticknor, Ronald D. Fiege | 2001-12-04 |
| 6296717 | Regeneration of chemical mechanical polishing pads in-situ | Adam D. Ticknor, Kenneth M. Davis, William Francis Landers, Michael L. Passow | 2001-10-02 |
| 6106374 | Acoustically agitated delivery | Leonard C. Stevens, Jr. | 2000-08-22 |
| 6102776 | Apparatus and method for controlling polishing of integrated circuit substrates | Kenneth M. Davis, William Francis Landers, Robert M. Merkling, Jr., Michael L. Passow, Jeremy K. Stephens | 2000-08-15 |
| 6087191 | Method for repairing surface defects | — | 2000-07-11 |
| 5972787 | CMP process using indicator areas to determine endpoint | Chenting Lin, Joachim Nuetzel, Robert Ploessl, Maria Ronay, Florian Schnabel +1 more | 1999-10-26 |