Issued Patents All Time
Showing 25 most recent of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300498 | Formulations to selectively etch silicon-germanium relative to silicon | — | 2025-05-13 |
| 12012540 | Compositions and methods for selectively etching silicon nitride films | Claudia Yevenes, Juhee Yeo | 2024-06-18 |
| 11875997 | Formulations to selectively etch silicon-germanium relative to silicon | — | 2024-01-16 |
| 11781066 | Wet etching composition and method | Youngmin Kim, Michael White, Daniela White, Emanuel I. Cooper | 2023-10-10 |
| 11697767 | Silicon nitride etching composition and method | SeongJin Hong, Hsing-Chen Wu, Min-Chieh Yang, Emanuel I. Cooper | 2023-07-11 |
| 11530356 | Compositions and methods for selectively etching silicon nitride films | Emanuel I. Cooper, Daniela White | 2022-12-20 |
| 11365351 | Wet etching composition and method | Youngmin Kim, Michael White, Daniela White, Emanuel I. Cooper | 2022-06-21 |
| 11053440 | Silicon nitride etching composition and method | SeongJin Hong, Hsing-Chen Wu, Min-Chieh Yang, Emanuel I. Cooper | 2021-07-06 |
| 10991809 | Composition and process for selectively etching p-doped polysilicon relative to silicon nitride | Emanuel I. Cooper | 2021-04-27 |
| 10957547 | Formulations to selectively etch silicon germanium relative to germanium | Emanuel I. Cooper | 2021-03-23 |
| 10651045 | Compositions and methods for etching silicon nitride-containing substrates | Emanuel I. Cooper, Wen-Haw Dai, Min-Chieh Yang, Sheng-Hung Tu, Hsing-Chen Wu +2 more | 2020-05-12 |
| 10475658 | Formulations to selectively etch silicon and germanium | Emanuel I. Cooper | 2019-11-12 |
| 10347504 | Use of non-oxidizing strong acids for the removal of ion-implanted resist | Emanuel I. Cooper, Jaeseok Lee, WonLae Kim, Jeffrey A. Barnes | 2019-07-09 |
| 10340150 | Ni:NiGe:Ge selective etch formulations and method of using same | Jeffrey A. Barnes, Emanuel I. Cooper, Hsing-Chen Wu, Sheng-Hung Tu, Thomas Parson +1 more | 2019-07-02 |
| 10290505 | Passivation of germanium surfaces | Emanuel I. Cooper, Hsing-Chen Wu, Min-Chieh Yang | 2019-05-14 |
| 10043658 | Precursors for silicon dioxide gap fill | William Hunks, Chongying Xu, Bryan C. Hendrix, Jeffrey F. Roeder, Weimin Li | 2018-08-07 |
| 9337054 | Precursors for silicon dioxide gap fill | William Hunks, Chongying Xu, Bryan C. Hendrix, Jeffrey F. Roeder, Weimin Li | 2016-05-10 |
| 9132412 | Component for solar adsorption refrigeration system and method of making such component | J. Donald Carruthers, Karl E. Boggs, Luping Wang, Shaun M. Wilson, Jose I. Arno +5 more | 2015-09-15 |
| 9074169 | Lithographic tool in situ clean formulations | Tianniu Chen, Karl E. Boggs, Ping Jiang, Michael B. Korzenski, George Mirth +1 more | 2015-07-07 |
| 8539781 | Component for solar adsorption refrigeration system and method of making such component | J. Donald Carruthers, Karl E. Boggs, Luping Wang, Shaun M. Wilson, Jose I. Arno +5 more | 2013-09-24 |
| 8241704 | Chemical vapor deposition of high conductivity, adherent thin films of ruthenium | Bryan C. Hendrix, James Welch, Jeffrey F. Roeder, Chongying Xu, Thomas H. Baum | 2012-08-14 |
| 8053375 | Super-dry reagent compositions for formation of ultra low k films | Chongying Xu, Jeffrey F. Roeder, Thomas H. Baum, Scott L. Battle, William Hunks +1 more | 2011-11-08 |
| 8034407 | Chemical vapor deposition of high conductivity, adherent thin films of ruthenium | Bryan C. Hendrix, James Welch, Jeffrey F. Roeder, Chongying Xu, Thomas H. Baum | 2011-10-11 |
| 7862857 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Michael W. Russell, Stephen T. Johnston, Daniel J. Vestyck +1 more | 2011-01-04 |
| 7705382 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Michael W. Russell, Stephen T. Johnston, Daniel J. Vestyck +1 more | 2010-04-27 |