Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272560 | Selective removal of metal oxide hard masks | SeungHyun Chae, Eric Hong, Juhee Yeo, WonLae Kim, JeongYeol Yang | 2025-04-08 |
| 12152187 | Nitride etchant composition and method | Eric Hong, WonLae Kim, JeongYeol Yang, SeungHyun Chae, Juhee Yeo | 2024-11-26 |
| 11697767 | Silicon nitride etching composition and method | Steven M. Bilodeau, Hsing-Chen Wu, Min-Chieh Yang, Emanuel I. Cooper | 2023-07-11 |
| 11492709 | Method and composition for etching molybdenum | Atanu K. Das, Daniela White, Emanuel I. Cooper, Eric Hong, JeongYeol Yang +5 more | 2022-11-08 |
| 11441229 | Method for selectively removing nickel platinum material | — | 2022-09-13 |
| 11053440 | Silicon nitride etching composition and method | Steven M. Bilodeau, Hsing-Chen Wu, Min-Chieh Yang, Emanuel I. Cooper | 2021-07-06 |
| 10651045 | Compositions and methods for etching silicon nitride-containing substrates | Emanuel I. Cooper, Steven M. Bilodeau, Wen-Haw Dai, Min-Chieh Yang, Sheng-Hung Tu +2 more | 2020-05-12 |