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Atanu K. Das

EN Entegris: 5 patents #126 of 643Top 20%
Overall (All Time): #959,178 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11492709 Method and composition for etching molybdenum Daniela White, Emanuel I. Cooper, Eric Hong, JeongYeol Yang, Juhee Yeo +5 more 2022-11-08
11164738 Compositions and methods for removing ceria particles from a surface Daniela White, Thomas Parson, Michael White, Emanuel I. Cooper 2021-11-02
11124740 Post chemical mechanical polishing cleaning compositions Michael White, Daniela White 2021-09-21
11124741 Ceria removal compositions Michael White, Daniela White 2021-09-21
11085011 Post CMP cleaning compositions for ceria particles Elizabeth THOMAS, Michael White, Daniela White 2021-08-10