Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272560 | Selective removal of metal oxide hard masks | SeungHyun Chae, SeongJin Hong, Eric Hong, Juhee Yeo, JeongYeol Yang | 2025-04-08 |
| 12152187 | Nitride etchant composition and method | Eric Hong, SeongJin Hong, JeongYeol Yang, SeungHyun Chae, Juhee Yeo | 2024-11-26 |
| 11492709 | Method and composition for etching molybdenum | Atanu K. Das, Daniela White, Emanuel I. Cooper, Eric Hong, JeongYeol Yang +5 more | 2022-11-08 |
| 10790187 | Post-etch residue removal for advanced node beol processing | Emanuel I. Cooper, Makonnen Payne, Eric Hong, Sheng-Hung Tu, Chieh-Ju Wang +1 more | 2020-09-29 |
| 10577567 | Cleaning compositions for removing post etch residue | Makonnen Payne, Emanuel I. Cooper, Eric Hong, Sean Kim | 2020-03-03 |
| 10347504 | Use of non-oxidizing strong acids for the removal of ion-implanted resist | Steven M. Bilodeau, Emanuel I. Cooper, Jaeseok Lee, Jeffrey A. Barnes | 2019-07-09 |