Selective removal of metal oxide hard masks

Assignee

• Entegris

Inventors

• SeungHyun Chae (3 patents)
• SeongJin Hong (7 patents)
• Eric Hong (12 patents)
• Juhee Yeo (4 patents)
• WonLae Kim (6 patents)
• JeongYeol Yang (3 patents)

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