Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334364 | Systems and methods for controlling precursor delivery | Michael Watson, Christopher J. Calhoun, Cristian Ocampo, Benjamin Cardozo, Benjamin R. Garrett | 2025-06-17 |
| 11821087 | Vaporization vessel and method | Bryan C. Hendrix, David James Eldridge, John N. Gregg, Jacob Thomas, Manuel F. Gonzales +2 more | 2023-11-21 |
| 11761086 | Cobalt precursors | Thomas H. Baum, John M. Cleary, David W. Peters, Philip S. H. Chen | 2023-09-19 |
| 11746413 | Chemical delivery system and method of operating the chemical delivery system | David James Eldridge, David Walter Peters, Robert Wright, Jr., Bryan C. Hendrix, John N. Gregg | 2023-09-05 |
| 11421320 | Chemical delivery system and method of operating the chemical delivery system | David James Eldridge, David Walter Peters, Robert Wright, Jr., Bryan C. Hendrix, John N. Gregg | 2022-08-23 |
| 10895010 | Solid precursor-based delivery of fluid utilizing controlled solids morphology | John M. Cleary, Jose I. Arno, Bryan C. Hendrix, Donn K. Naito, John N. Gregg +2 more | 2021-01-19 |
| 10895347 | Heat transfer to ampoule trays | Bryan C. Hendrix, John N. Gregg | 2021-01-19 |
| 10526697 | High-purity tungsten hexacarbonyl for solid source delivery | Thomas H. Baum, Robert Wright, Jr., John M. Cleary | 2020-01-07 |
| 10465286 | Method and apparatus to help promote contact of gas with vaporized material | John N. Gregg, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2019-11-05 |
| 10392700 | Solid vaporizer | Thomas H. Baum, Robert Wright, Jr., Bryan C. Hendrix, John M. Cleary | 2019-08-27 |
| 10385452 | Source reagent-based delivery of fluid with high material flux for batch deposition | Bryan C. Hendrix, John N. Gregg, Donn K. Naito, Kyle Bartosh, John M. Cleary +2 more | 2019-08-20 |
| 9997362 | Cobalt CVD | Thomas H. Baum, David W. Peters, Philip S. H. Chen | 2018-06-12 |
| 9637395 | Fluorine free tungsten ALD/CVD process | Weimin Li, David W. Peters, William Hunks | 2017-05-02 |
| 9469898 | Method and apparatus to help promote contact of gas with vaporized material | John N. Gregg, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2016-10-18 |
| 9004462 | Method and apparatus to help promote contact of gas with vaporized material | John N. Gregg, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2015-04-14 |
| 8821640 | Solid precursor-based delivery of fluid utilizing controlled solids morphology | John M. Cleary, Jose I. Arno, Bryan C. Hendrix, Donn K. Naito, John N. Gregg +2 more | 2014-09-02 |
| 8444120 | Method and apparatus to help promote contact of gas with vaporized material | John N. Gregg, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2013-05-21 |
| 8128073 | Method and apparatus to help promote contact of gas with vaporized material | John N. Gregg, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2012-03-06 |
| 8053375 | Super-dry reagent compositions for formation of ultra low k films | Chongying Xu, Jeffrey F. Roeder, Thomas H. Baum, Steven M. Bilodeau, William Hunks +1 more | 2011-11-08 |
| 7828274 | Method and apparatus to help promote contact of gas with vaporized material | John N. Gregg, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2010-11-09 |
| 7556244 | Method and apparatus to help promote contact of gas with vaporized material | John N. Gregg, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2009-07-07 |
| 7487956 | Method and apparatus to help promote contact of gas with vaporized material | John N. Gregg, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2009-02-10 |
| 7300038 | Method and apparatus to help promote contact of gas with vaporized material | John N. Gregg, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2007-11-27 |
| 7108771 | Method for removal of impurities in cyclic siloxanes useful as precursors for low dielectric constant thin films | Chongying Xu, Thomas H. Baum, Alexander Borovik, Ziyun Wang, James Lin +1 more | 2006-09-19 |
| 6921062 | Vaporizer delivery ampoule | John N. Gregg, Jeffrey I. Banton, Donn K. Naito, Marianne Fuierer | 2005-07-26 |