Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821087 | Vaporization vessel and method | Bryan C. Hendrix, Scott L. Battle, David James Eldridge, Jacob Thomas, Manuel F. Gonzales +2 more | 2023-11-21 |
| 11746413 | Chemical delivery system and method of operating the chemical delivery system | David James Eldridge, David Walter Peters, Robert Wright, Jr., Bryan C. Hendrix, Scott L. Battle | 2023-09-05 |
| 11421320 | Chemical delivery system and method of operating the chemical delivery system | David James Eldridge, David Walter Peters, Robert Wright, Jr., Bryan C. Hendrix, Scott L. Battle | 2022-08-23 |
| 10895010 | Solid precursor-based delivery of fluid utilizing controlled solids morphology | John M. Cleary, Jose I. Arno, Bryan C. Hendrix, Donn K. Naito, Scott L. Battle +2 more | 2021-01-19 |
| 10895347 | Heat transfer to ampoule trays | Bryan C. Hendrix, Scott L. Battle | 2021-01-19 |
| 10465286 | Method and apparatus to help promote contact of gas with vaporized material | Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2019-11-05 |
| 10385452 | Source reagent-based delivery of fluid with high material flux for batch deposition | Bryan C. Hendrix, Scott L. Battle, Donn K. Naito, Kyle Bartosh, John M. Cleary +2 more | 2019-08-20 |
| 9469898 | Method and apparatus to help promote contact of gas with vaporized material | Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2016-10-18 |
| 9004462 | Method and apparatus to help promote contact of gas with vaporized material | Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2015-04-14 |
| 8821640 | Solid precursor-based delivery of fluid utilizing controlled solids morphology | John M. Cleary, Jose I. Arno, Bryan C. Hendrix, Donn K. Naito, Scott L. Battle +2 more | 2014-09-02 |
| 8444120 | Method and apparatus to help promote contact of gas with vaporized material | Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2013-05-21 |
| 8128073 | Method and apparatus to help promote contact of gas with vaporized material | Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2012-03-06 |
| 7828274 | Method and apparatus to help promote contact of gas with vaporized material | Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2010-11-09 |
| 7556244 | Method and apparatus to help promote contact of gas with vaporized material | Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2009-07-07 |
| 7487956 | Method and apparatus to help promote contact of gas with vaporized material | Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2009-02-10 |
| 7300038 | Method and apparatus to help promote contact of gas with vaporized material | Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Ravi Laxman | 2007-11-27 |
| 6921062 | Vaporizer delivery ampoule | Scott L. Battle, Jeffrey I. Banton, Donn K. Naito, Marianne Fuierer | 2005-07-26 |
| 6880592 | Canister guard | Donn K. Naito | 2005-04-19 |
| 6637475 | Bulk chemical delivery system | Craig M. Noah, Robert M. Jackson, Craig Esser | 2003-10-28 |
| 6629627 | Level control systems for high purity chemical delivery systems | Stephen H. Siegele, Craig M. Noah | 2003-10-07 |
| 6557593 | Refillable ampule and method re same | Stephen H. Siegele, Craig M. Noah | 2003-05-06 |
| 6520218 | Container chemical guard | Gregory W. Harris, Frank L. Cook, Robert M. Jackson | 2003-02-18 |
| 6457494 | Chemical delivery system having purge system utilizing multiple purge techniques | Craig M. Noah, Robert M. Jackson | 2002-10-01 |
| 6435229 | Bulk chemical delivery system | Craig M. Noah, Robert M. Jackson, Craig Esser | 2002-08-20 |
| 6296025 | Chemical delivery system having purge system utilizing multiple purge techniques | Craig M. Noah, Robert M. Jackson | 2001-10-02 |