Issued Patents All Time
Showing 25 most recent of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10895010 | Solid precursor-based delivery of fluid utilizing controlled solids morphology | John M. Cleary, Bryan C. Hendrix, Donn K. Naito, Scott L. Battle, John N. Gregg +2 more | 2021-01-19 |
| 9868185 | Polishing pad with foundation layer and window attached thereto | Paul Andre Lefevre, William C. Allison, Diane Scott | 2018-01-16 |
| 9666435 | Apparatus and process for integrated gas blending | Jeffrey J. Homan, Joseph D. Sweeney | 2017-05-30 |
| 9636626 | Rectangular parallelepiped fluid storage and dispensing vessel | Dennis Brestovansky, Michael J. Wodjenski, J. Donald Carruthers, Philip A. Moroco | 2017-05-02 |
| 9455147 | Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation | W. Karl Olander, Robert Kaim | 2016-09-27 |
| 9340878 | TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same | Joseph R. Despres, Shkelqim Letaj, Steven M. Lurcott, Thomas H. Baum, Peng Zou | 2016-05-17 |
| 9132412 | Component for solar adsorption refrigeration system and method of making such component | J. Donald Carruthers, Karl E. Boggs, Luping Wang, Shaun M. Wilson, Paul J. Marganski +5 more | 2015-09-15 |
| 9062829 | Rectangular parallelepiped fluid storage and dispensing vessel | Dennis Brestovansky, Michael J. Wodjenski, J. Donald Carruthers, Philip A. Moroco | 2015-06-23 |
| 8821640 | Solid precursor-based delivery of fluid utilizing controlled solids morphology | John M. Cleary, Bryan C. Hendrix, Donn K. Naito, Scott L. Battle, John N. Gregg +2 more | 2014-09-02 |
| 8603252 | Cleaning of semiconductor processing systems | Frank Dimeo, Jr., James Dietz, W. Karl Olander, Robert Kaim, Steven E. Bishop +7 more | 2013-12-10 |
| 8539781 | Component for solar adsorption refrigeration system and method of making such component | J. Donald Carruthers, Karl E. Boggs, Luping Wang, Shaun M. Wilson, Paul J. Marganski +5 more | 2013-09-24 |
| 8506689 | Rectangular parallelepiped fluid storage and dispensing vessel | Dennis Brestovansky, Michael J. Wodjenski, J. Donald Carruthers, Phillip A. Moroco | 2013-08-13 |
| 8389068 | Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation | W. Karl Olander, Robert Kaim | 2013-03-05 |
| 8282023 | Fluid storage and dispensing systems, and fluid supply processes comprising same | W. Karl Olander, James V. McManus, Steven J. Hultquist, Peter C. Van Buskirk | 2012-10-09 |
| 8244482 | Photometrically modulated delivery of reagents | — | 2012-08-14 |
| 8153434 | Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness and method of making same | Paul J. Marganski, Edward A. Sturm, Kristy L. Zaleta | 2012-04-10 |
| 8003391 | Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making same | Paul J. Marganski, Edward A. Sturm, Kristy L. Zaleta | 2011-08-23 |
| 7972421 | Rectangular parallelepiped fluid storage and dispensing vessel | Dennis Brestovansky, Michael J. Wodjenski, J. Donald Carruthers, Phillip A. Moroco | 2011-07-05 |
| 7951225 | Fluid storage and dispensing systems, and fluid supply processes comprising same | W. Karl Olander, James V. McManus, Steven J. Hultquist, Peter C. Van Buskirk | 2011-05-31 |
| 7943204 | Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation | W. Karl Olander, Robert Kaim | 2011-05-17 |
| 7925450 | Photometrically modulated delivery of reagents | — | 2011-04-12 |
| 7819981 | Methods for cleaning ion implanter components | Frank Dimeo, Jr., James Dietz, W. Karl Olander, Robert Kaim, Steven E. Bishop +1 more | 2010-10-26 |
| 7780747 | Apparatus and method for hydrogen generation from gaseous hydride | J. Donald Carruthers | 2010-08-24 |
| 7723685 | Monitoring system comprising infrared thermopile detector | — | 2010-05-25 |
| 7711496 | Photometrically modulated delivery of reagents | — | 2010-05-04 |