Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537353 | Abatement of effluents from chemical vapor deposition processes using organometallic source reagents | Mark Holst, Ray Dubois, Rebecca Faller, Glenn M. Tom | 2003-03-25 |
| 6500487 | Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions | Mark Holst, Rebecca Faller, Glenn M. Tom, Ray Dubois | 2002-12-31 |
| 6391385 | Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents | Mark Holst, Ray Dubois, Rebecca Faller, Glenn M. Tom | 2002-05-21 |
| 6338312 | Integrated ion implant scrubber system | Michael W. Hayes, Mark Holst | 2002-01-15 |
| 6322756 | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases | Mark Holst, Kent Carpenter, Scott Lane | 2001-11-27 |