Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7501010 | Rectangular parallelepiped fluid storage and dispending vessel | Dennis Brestovansky, Michael J. Wodjenski, J. Donald Carruthers, Philip A. Moroco | 2009-03-10 |
| 7373257 | Photometrically modulated delivery of reagents | — | 2008-05-13 |
| 7351976 | Monitoring system comprising infrared thermopile detector | — | 2008-04-01 |
| 7325560 | In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration | James Dietz | 2008-02-05 |
| 7253002 | Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making same | Paul J. Marganski, Edward A. Sturm, Kristy L. Zaleta | 2007-08-07 |
| 7172918 | Infrared thermopile detector system for semiconductor process monitoring and control | — | 2007-02-06 |
| 7129519 | Monitoring system comprising infrared thermopile detector | — | 2006-10-31 |
| 7063097 | In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration | James Dietz | 2006-06-20 |
| 7058519 | Photometrically modulated delivery of reagents | — | 2006-06-06 |
| 7018448 | Gas cabinet including integrated effluent scrubber | Michael J. Wodjenski | 2006-03-28 |
| 7011614 | Infrared thermopile detector system for semiconductor process monitoring and control | — | 2006-03-14 |
| 6991671 | Rectangular parallelepiped fluid storage and dispensing vessel | Dennis Brestovansky, Michael J. Wodjenski, J. Donald Carruthers | 2006-01-31 |
| 6947138 | Optical sensor system and method for detection of hydrides and acid gases | — | 2005-09-20 |
| 6909973 | Photometrically modulated delivery of reagents | — | 2005-06-21 |
| 6905663 | Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas | — | 2005-06-14 |
| 6841141 | System for in-situ generation of fluorine radicals and/or fluorine-containing interhalogen (XFn) compounds for use in cleaning semiconductor processing chambers | W. Karl Olander | 2005-01-11 |
| 6833024 | Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions | Mark Holst, Rebecca Faller, Glenn M. Tom, Ray Dubois | 2004-12-21 |
| 6821795 | Infrared thermopile detector system for semiconductor process monitoring and control | — | 2004-11-23 |
| 6759018 | Method for point-of-use treatment of effluent gas streams | Mark Holst, Sam Yee, Joseph D. Sweeney, Jeff Lorelli, Jason Deseve | 2004-07-06 |
| 6749671 | Abatement of effluents from chemical vapor deposition processes using organometallic source reagents | Mark Holst, Ray Dubois, Rebecca Faller, Glenn M. Tom | 2004-06-15 |
| 6716271 | Apparatus and method for inhibiting decomposition of germane | Edward A. Sturm, Luping Wang, James Dietz | 2004-04-06 |
| 6620256 | Non-plasma in-situ cleaning of processing chambers using static flow methods | Luping Wang, Glenn M. Tom | 2003-09-16 |
| 6617175 | Infrared thermopile detector system for semiconductor process monitoring and control | — | 2003-09-09 |
| 6576573 | Atmospheric pressure plasma enhanced abatement of semiconductor process effluent species | — | 2003-06-10 |
| 6540814 | Integrated ion implant scrubber system | Michael W. Hayes, Mark Holst, Glenn M. Tom | 2003-04-01 |