Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11619538 | Device for calibrating oil-water two-phase flow sensor | Yong Wei, Tao Guo, Xiaoming Cui, YiPan Lu, Yuxiang Wang +2 more | 2023-04-04 |
| 9132412 | Component for solar adsorption refrigeration system and method of making such component | J. Donald Carruthers, Karl E. Boggs, Shaun M. Wilson, Jose I. Arno, Paul J. Marganski +5 more | 2015-09-15 |
| 8562937 | Production of carbon nanotubes | J. Donald Carruthers, Xueping Xu | 2013-10-22 |
| 8539781 | Component for solar adsorption refrigeration system and method of making such component | J. Donald Carruthers, Karl E. Boggs, Shaun M. Wilson, Jose I. Arno, Paul J. Marganski +5 more | 2013-09-24 |
| 7857880 | Semiconductor manufacturing facility utilizing exhaust recirculation | W. Karl Olander, Joseph D. Sweeney | 2010-12-28 |
| 7798168 | Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases | W. Karl Olander, Matthew B. Donatucci, Michael J. Wodjenski | 2010-09-21 |
| 7614421 | Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases | W. Karl Olander, Matthew B. Donatucci, Michael J. Wodjenski | 2009-11-10 |
| 7485169 | Semiconductor manufacturing facility utilizing exhaust recirculation | W. Karl Olander, Joseph D. Sweeney | 2009-02-03 |
| 7437060 | Delivery systems for efficient vaporization of precursor source material | Thomas H. Baum, Chongying Xu | 2008-10-14 |
| 7328716 | Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases | W. Karl Olander, Matthew B. Donatucci, Michael J. Wodjenski | 2008-02-12 |
| 7105037 | Semiconductor manufacturing facility utilizing exhaust recirculation | W. Karl Olander, Joseph D. Sweeney | 2006-09-12 |
| 7048785 | Adsorbents for low vapor pressure fluid storage and delivery | Doug Neugold | 2006-05-23 |
| 6909839 | Delivery systems for efficient vaporization of precursor source material | Thomas H. Baum, Chongying Xu | 2005-06-21 |
| 6857447 | Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases | W. Karl Olander, Matthew B. Donatucci, Michael J. Wodjenski | 2005-02-22 |
| 6805728 | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream | Joseph D. Sweeney, Paul J. Marganski, W. Karl Olander | 2004-10-19 |
| 6740586 | Vapor delivery system for solid precursors and method of using same | Thomas H. Baum, Chongying Xu | 2004-05-25 |
| 6716271 | Apparatus and method for inhibiting decomposition of germane | Jose I. Arno, Edward A. Sturm, James Dietz | 2004-04-06 |
| 6660063 | Sorbent-based gas storage and delivery system | Glenn M. Tom, James V. McManus, W. Karl Olander | 2003-12-09 |
| 6620256 | Non-plasma in-situ cleaning of processing chambers using static flow methods | Jose I. Arno, Glenn M. Tom | 2003-09-16 |
| 6620225 | Adsorbents for low vapor pressure fluid storage and delivery | Doug Neugold | 2003-09-16 |
| 6592653 | Fluid storage and delivery system utilizing low heels carbon sorbent medium | Joseph Salsbury | 2003-07-15 |
| 6561213 | Fluid distribution system and process, and semiconductor fabrication facility utilizing same | Terry A. Tabler, James Dietz | 2003-05-13 |
| 6474076 | Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing | Glenn M. Tom, James Dietz, Steven M. Lurcott, Steven J. Hultquist | 2002-11-05 |
| 6453924 | Fluid distribution system and process, and semiconductor fabrication facility utilizing same | Terry A. Tabler, James Dietz | 2002-09-24 |
| 6360546 | Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing | Glenn M. Tom, James Dietz, Steven M. Lurcott, Steven J. Hultquist | 2002-03-26 |