Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11826870 | Apparatus and method for double-side polishing work | Mami KUBOTA | 2023-11-28 |
| 11717931 | Apparatus and method for double-side polishing work | Mami KUBOTA | 2023-08-08 |
| 11703452 | Method and apparatus for measuring transmittance of quartz crucible | Yasunobu Shimizu, Takeshi Fujita, Eriko Kitahara, Masanori Fukui | 2023-07-18 |
| 11618971 | Method and apparatus for manufacturing defect-free monocrystalline silicon crystal | Ippei Shimozaki | 2023-04-04 |
| 11361462 | Method of evaluating inner circumference of quartz crucible and quartz crucible inner circumference evaluation apparatus | Yasunobu Shimizu, Toshihiko Uchida | 2022-06-14 |
| 10903099 | Semiconductor wafer placement position determination method and semiconductor epitaxial wafer production method | Ikuhiro Nakamura | 2021-01-26 |
| 10472733 | Silicon single crystal manufacturing method | Ken Hamada | 2019-11-12 |
| 10261125 | Semiconductor wafer evaluation standard setting method, semiconductor wafer evaluation method, semiconductor wafer manufacturing process evaluation method, and semiconductor wafer manufacturing method | Takahiro NAGASAWA | 2019-04-16 |
| 9816199 | Method of manufacturing single crystal | Ken Hamada | 2017-11-14 |
| 9707659 | Method and apparatus for polishing workpiece | Shinichi Ogata, Ryuichi Tanimoto | 2017-07-18 |
| 9708731 | Method of producing silicon single crystal | Ken Hamada | 2017-07-18 |
| 9567692 | Silicon single crystal manufacturing apparatus and silicon single crystal manufacturing method | Ken Hamada | 2017-02-14 |
| 9289876 | Method and apparatus for polishing work | Shinichi Ogata | 2016-03-22 |
| 9284660 | Apparatus of producing silicon single crystal and method of producing silicon single crystal | Ken Hamada | 2016-03-15 |
| 8900033 | Wafer polishing method | Kazushige Takaishi, Tetsurou Taniguchi, Shinichi Ogata, Shunsuke Mikuriya | 2014-12-02 |
| 8871023 | Silicon single crystal pull-up apparatus and method of manufacturing silicon single crystal | Kengo Hayashi, Yasuhito Narushima | 2014-10-28 |
| 8801853 | Mechanism for controlling melt level in single crystal pulling apparatus, method for controlling melt level in single crystal pulling apparatus, mechanism for adjusting melt level in single crystal pulling apparatus and method for adjusting melt level while pulling single crystal | — | 2014-08-12 |
| 8673075 | Procedure for in-situ determination of thermal gradients at the crystal growth front | Benno Orschel, Andrzej Buczkowski, Joel Kearns, Volker Todt | 2014-03-18 |
| 8641822 | Method and apparatus for controlling diameter of a silicon crystal ingot in a growth process | Benno Orschel, Joel Kearns, Volker Todt | 2014-02-04 |
| 8545623 | Method and apparatus for controlling the growth process of a monocrystalline silicon ingot | Benno Orschel | 2013-10-01 |
| 8496765 | Method for correcting speed deviations between actual and nominal pull speed during crystal growth | Benno Orschel | 2013-07-30 |
| 8414701 | Method for manufacturing silicon single crystal in which a crystallization temperature gradient is controlled | — | 2013-04-09 |
| 8221545 | Procedure for in-situ determination of thermal gradients at the crystal growth front | Benno Orschel, Andrzej Buczkowski, Joel Kearns, Volker Todt | 2012-07-17 |
| 8187378 | Silicon single crystal pulling method | — | 2012-05-29 |
| 8012255 | Method and apparatus for controlling diameter of a silicon crystal ingot in a growth process | Benno Orschel, Joel Kearns, Volker Todt | 2011-09-06 |