Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12311496 | Method of double-side polishing work, method of producing work, and double-side polishing apparatus for a work | Chin-Fu Tsai | 2025-05-27 |
| 9190267 | Epitaxial silicon wafer and production method thereof | Takayuki Kihara, Yasuyuki Hashimoto | 2015-11-17 |
| 8900033 | Wafer polishing method | Keiichi Takanashi, Tetsurou Taniguchi, Shinichi Ogata, Shunsuke Mikuriya | 2014-12-02 |
| 8759229 | Method for manufacturing epitaxial wafer | Sakae Koyata, Tomohiro Hashii, Katsuhiko Murayama, Takeo Katoh | 2014-06-24 |
| 8728942 | Method for producing epitaxial silicon wafer | Shinichi Ogata, Hironori Nishimura, Shigeru Okuuchi, Shunsuke Mikuriya, Yuichi Nakayoshi | 2014-05-20 |
| 8466071 | Method for etching single wafer | Sakae Koyata, Tomohiro Hashii, Katsuhiko Murayama, Takeo Katoh | 2013-06-18 |
| 8147295 | Method of polishing silicon wafer | Takeo Katoh, Ryuichi Tanimoto, Shinichi Ogata, Takeru Takushima | 2012-04-03 |
| 8080106 | Epitaxial silicon wafer and production method thereof | Takayuki Kihara, Yasuyuki Hashimoto | 2011-12-20 |
| 8066896 | Apparatus for etching wafer by single-wafer process and single wafer type method for etching wafer | Sakae Koyata, Tomohiro Hashii, Katsuhiko Murayama, Takeo Katoh | 2011-11-29 |
| 7998867 | Method for manufacturing epitaxial wafer | Tomonori Miura | 2011-08-16 |
| 7955440 | Method for cleaning silicon wafer and apparatus for cleaning the silicon wafer | Shigeru Okuuchi | 2011-06-07 |
| 7955982 | Method for smoothing wafer surface and apparatus used therefor | Takeo Katoh, Tomohiro Hashii, Katsuhiko Murayama, Sakae Koyata | 2011-06-07 |
| 7906438 | Single wafer etching method | Sakae Koyata, Tomohiro Hashii, Katsuhiko Murayama, Takeo Katoh | 2011-03-15 |
| 7851375 | Alkaline etchant for controlling surface roughness of semiconductor wafer | Sakae Koyata | 2010-12-14 |
| 7717768 | Wafer polishing apparatus and method for polishing wafers | Tomohiro Hashii, Katsuhiko Murayama, Sakae Koyata | 2010-05-18 |
| 7648890 | Process for producing silicon wafer | Sakae Koyata, Tomohiro Hashii, Katsuhiko Murayama, Takeo Katoh | 2010-01-19 |
| 7645702 | Manufacturing method of silicon wafer | Sakae Koyata | 2010-01-12 |
| 7601644 | Method for manufacturing silicon wafers | Sakae Koyata, Tomohiro Hashii, Katsuhiko Murayama, Takeo Katoh | 2009-10-13 |
| 7601642 | Method of processing silicon wafer | Sakae Koyata | 2009-10-13 |
| 7488400 | Apparatus for etching wafer by single-wafer process | Sakae Koyata, Tomohiro Hashii, Katsuhiko Murayama, Takeo Katoh | 2009-02-10 |
| 7456106 | Method for producing a silicon wafer | Sakae Koyata, Tohru Taniguchi, Kazuo Fujimaki | 2008-11-25 |
| 7338904 | Method for manufacturing single-side mirror surface wafer | Sakae Koyata, Tadashi Denda, Masashi Norimoto | 2008-03-04 |
| 7226864 | Method for producing a silicon wafer | Sakae Koyata, Tohru Taniguchi, Kazuo Fujimaki, Akihiro Kudo, Masashi Norimoto | 2007-06-05 |
| 6296714 | Washing solution of semiconductor substrate and washing method using the same | Chizuko Matsuo, Mikio Kishimoto | 2001-10-02 |
| 6146467 | Treatment method for semiconductor substrates | Ryoko Takada | 2000-11-14 |