Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8759229 | Method for manufacturing epitaxial wafer | Kazushige Takaishi, Tomohiro Hashii, Katsuhiko Murayama, Takeo Katoh | 2014-06-24 |
| 8466071 | Method for etching single wafer | Tomohiro Hashii, Katsuhiko Murayama, Kazushige Takaishi, Takeo Katoh | 2013-06-18 |
| 8066896 | Apparatus for etching wafer by single-wafer process and single wafer type method for etching wafer | Tomohiro Hashii, Katsuhiko Murayama, Kazushige Takaishi, Takeo Katoh | 2011-11-29 |
| 7955982 | Method for smoothing wafer surface and apparatus used therefor | Takeo Katoh, Tomohiro Hashii, Katsuhiko Murayama, Kazushige Takaishi | 2011-06-07 |
| 7906438 | Single wafer etching method | Tomohiro Hashii, Katsuhiko Murayama, Kazushige Takaishi, Takeo Katoh | 2011-03-15 |
| 7851375 | Alkaline etchant for controlling surface roughness of semiconductor wafer | Kazushige Takaishi | 2010-12-14 |
| 7717768 | Wafer polishing apparatus and method for polishing wafers | Tomohiro Hashii, Katsuhiko Murayama, Kazushige Takaishi | 2010-05-18 |
| 7648890 | Process for producing silicon wafer | Tomohiro Hashii, Katsuhiko Murayama, Kazushige Takaishi, Takeo Katoh | 2010-01-19 |
| 7645702 | Manufacturing method of silicon wafer | Kazushige Takaishi | 2010-01-12 |
| 7601644 | Method for manufacturing silicon wafers | Tomohiro Hashii, Katsuhiko Murayama, Kazushige Takaishi, Takeo Katoh | 2009-10-13 |
| 7601642 | Method of processing silicon wafer | Kazushige Takaishi | 2009-10-13 |
| 7488400 | Apparatus for etching wafer by single-wafer process | Tomohiro Hashii, Katsuhiko Murayama, Kazushige Takaishi, Takeo Katoh | 2009-02-10 |
| 7456106 | Method for producing a silicon wafer | Kazushige Takaishi, Tohru Taniguchi, Kazuo Fujimaki | 2008-11-25 |
| 7338904 | Method for manufacturing single-side mirror surface wafer | Tadashi Denda, Masashi Norimoto, Kazushige Takaishi | 2008-03-04 |
| 7288207 | Etching liquid for controlling silicon wafer surface shape and method for manufacturing silicon wafer using the same | Yuichi Kakizono, Tomohiro Hashii, Katsuhiko Murayama | 2007-10-30 |
| 7226864 | Method for producing a silicon wafer | Kazushige Takaishi, Tohru Taniguchi, Kazuo Fujimaki, Akihiro Kudo, Masashi Norimoto | 2007-06-05 |