Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772231 | Double-sided wafer polishing method | Tomonori Miura | 2023-10-03 |
| 11170988 | Method of double-side polishing silicon wafer | Ryuichi Tanimoto, Ichiro Yamazaki | 2021-11-09 |
| 11127584 | Method of producing carrier and method of polishing wafer | Tomonori Miura | 2021-09-21 |
| 8932952 | Method for polishing silicon wafer and polishing liquid therefor | Shinichi Ogata, Ryuichi Tanimoto, Ichiro Yamasaki | 2015-01-13 |
| 8900033 | Wafer polishing method | Kazushige Takaishi, Keiichi Takanashi, Tetsurou Taniguchi, Shinichi Ogata | 2014-12-02 |
| 8728942 | Method for producing epitaxial silicon wafer | Shinichi Ogata, Kazushige Takaishi, Hironori Nishimura, Shigeru Okuuchi, Yuichi Nakayoshi | 2014-05-20 |