Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11559869 | Wafer edge polishing apparatus and method | Makoto Ando, Tatsunori Izumi, Yuhei Matsunaga, Yasuo Yamada | 2023-01-24 |
| 11170988 | Method of double-side polishing silicon wafer | Ichiro Yamazaki, Shunsuke Mikuriya | 2021-11-09 |
| 11075085 | Wafer polishing method | Takashi Nishitani | 2021-07-27 |
| 10710209 | Wafer polishing apparatus and polishing head used for same | Ryoya TERAKAWA, Hironori Kaneko | 2020-07-14 |
| 10344187 | Polishing composition and polishing method using the same | Masashi Teramoto, Shinichi Ogata | 2019-07-09 |
| 9707659 | Method and apparatus for polishing workpiece | Shinichi Ogata, Keiichi Takanashi | 2017-07-18 |
| 8932952 | Method for polishing silicon wafer and polishing liquid therefor | Shinichi Ogata, Ichiro Yamasaki, Shunsuke Mikuriya | 2015-01-13 |
| 8877643 | Method of polishing a silicon wafer | Shuhei Matsuda, Tetsuro Iwashita, Takeru Takushima, Takeo Katoh | 2014-11-04 |
| 8147295 | Method of polishing silicon wafer | Takeo Katoh, Shinichi Ogata, Takeru Takushima, Kazushige Takaishi | 2012-04-03 |