Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12285840 | Polishing head, polishing apparatus, and method of manufacturing semiconductor wafer | Yuki Nakano, Takayuki Kihara, Hiroki Ota | 2025-04-29 |
| 12179308 | Method of transferring semiconductor wafer to polishing apparatus and method of producing semiconductor wafer | — | 2024-12-31 |
| 11554458 | Polishing head, wafer polishing apparatus using the same, and wafer polishing method using the same | Yuki Nakano, Katsuhisa SUGIMORI, Kazuaki Kozasa, Jiro Kajiwara, Katsutoshi Yamamoto +1 more | 2023-01-17 |
| 10744616 | Wafer polishing method and apparatus | Tomonori Kawasaki | 2020-08-18 |
| 10710209 | Wafer polishing apparatus and polishing head used for same | Ryuichi Tanimoto, Hironori Kaneko | 2020-07-14 |
| 8784159 | Method for polishing semiconductor wafer | Kenji Aoki | 2014-07-22 |