Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11628534 | Silicon wafer single-side polishing method | Toshiharu Nakajima, Kazuaki Kozasa, Syunya Kobuchi | 2023-04-18 |
| 11554458 | Polishing head, wafer polishing apparatus using the same, and wafer polishing method using the same | Yuki Nakano, Kazuaki Kozasa, Jiro Kajiwara, Katsutoshi Yamamoto, Takayuki Kihara +1 more | 2023-01-17 |
| 9991110 | Method for manufacturing semiconductor wafer | Kazuaki Kozasa, Syunya Kobuchi | 2018-06-05 |
| 9956663 | Method for polishing silicon wafer | Kazuaki Kozasa, Syunya Kobuchi | 2018-05-01 |