Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11628534 | Silicon wafer single-side polishing method | Toshiharu Nakajima, Katsuhisa SUGIMORI, Syunya Kobuchi | 2023-04-18 |
| 11554458 | Polishing head, wafer polishing apparatus using the same, and wafer polishing method using the same | Yuki Nakano, Katsuhisa SUGIMORI, Jiro Kajiwara, Katsutoshi Yamamoto, Takayuki Kihara +1 more | 2023-01-17 |
| 11211285 | Method of producing bonded wafer and bonded wafer | Youzou Satou | 2021-12-28 |
| 9991110 | Method for manufacturing semiconductor wafer | Syunya Kobuchi, Katsuhisa SUGIMORI | 2018-06-05 |
| 9956663 | Method for polishing silicon wafer | Katsuhisa SUGIMORI, Syunya Kobuchi | 2018-05-01 |
| 9305850 | Etching method and etching apparatus of semiconductor wafer | Tomonori Kawasaki | 2016-04-05 |
| 8992791 | Method of cleaning semiconductor wafer and semiconductor wafer | Tomonori Kawasaki, Takahisa Sugiman, Hironori Nishimura | 2015-03-31 |
| 8696809 | Manufacturing method of epitaxial silicon wafer and substrate cleaning apparatus | Kosuke Miyoshi | 2014-04-15 |
| 8303373 | Slurry supplying apparatus and method of polishing semiconductor wafer utilizing same | — | 2012-11-06 |
| 8273260 | Etching method and etching apparatus of semiconductor wafer | Tomonori Kawasaki | 2012-09-25 |
| 7666063 | Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer | Tomonori Kawasaki, Kosuke Miyoshi | 2010-02-23 |
| 7540800 | Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer | Tomonori Kawasaki, Kosuke Miyoshi | 2009-06-02 |
| 7303691 | Polishing method for semiconductor wafer | Motoharu Yamada, Yasuhiro Tomita, Hiromi Wakabayashi | 2007-12-04 |