Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8992791 | Method of cleaning semiconductor wafer and semiconductor wafer | Kazuaki Kozasa, Tomonori Kawasaki, Hironori Nishimura | 2015-03-31 |
| 7875117 | Nitrogen doped silicon wafer and manufacturing method thereof | Kouzo Nakamura, Susumu Maeda, Kouichirou Hayashida, Katsuhiko Sugisawa | 2011-01-25 |
| 7759227 | Silicon semiconductor substrate heat-treatment method and silicon semiconductor substrate treated by the method | Susumu Maeda, Shinya Sadohara, Shiro Yoshino, Kouzo Nakamura | 2010-07-20 |