Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11583975 | Dresser, polishing device, and method of dressing polishing pad | — | 2023-02-21 |
| 11097397 | Polishing device, polishing method, and record medium | Takashi Watanabe, Takeshi Arakawa, Hiroaki Hayasaka, Dai Fukushima | 2021-08-24 |
| 10744616 | Wafer polishing method and apparatus | Ryoya TERAKAWA | 2020-08-18 |
| 10391607 | Single-wafer processing method of polishing one side of semiconductor wafer and single-wafer processing apparatus for polishing one side of semiconductor wafer | — | 2019-08-27 |
| 9919402 | Method of polishing wafer and wafer polishing apparatus | — | 2018-03-20 |
| 9630292 | Single side polishing apparatus for wafer | — | 2017-04-25 |
| 9305850 | Etching method and etching apparatus of semiconductor wafer | Kazuaki Kozasa | 2016-04-05 |
| 9266213 | Method of polishing one side of wafer and single side polishing apparatus for wafer | — | 2016-02-23 |
| 8992791 | Method of cleaning semiconductor wafer and semiconductor wafer | Kazuaki Kozasa, Takahisa Sugiman, Hironori Nishimura | 2015-03-31 |
| 8664092 | Method for cleaning silicon wafer, and method for producing epitaxial wafer using the cleaning method | — | 2014-03-04 |
| 8334222 | Semiconductor wafer processing method and apparatus | Isamu Gotou | 2012-12-18 |
| 8273260 | Etching method and etching apparatus of semiconductor wafer | Kazuaki Kozasa | 2012-09-25 |
| 7666063 | Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer | Kazuaki Kozasa, Kosuke Miyoshi | 2010-02-23 |
| 7540800 | Rough polishing method of semiconductor wafer and polishing apparatus of semiconductor wafer | Kazuaki Kozasa, Kosuke Miyoshi | 2009-06-02 |