Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11003085 | Extreme ultraviolet light generating apparatus | — | 2021-05-11 |
| 7875117 | Nitrogen doped silicon wafer and manufacturing method thereof | Kouzo Nakamura, Susumu Maeda, Kouichirou Hayashida, Takahisa Sugiman | 2011-01-25 |