Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8877643 | Method of polishing a silicon wafer | Shuhei Matsuda, Ryuichi Tanimoto, Takeru Takushima, Takeo Katoh | 2014-11-04 |
| 8815710 | Silicon epitaxial wafer and method for production thereof | Masayuki Ishibashi, Shinji Nakahara | 2014-08-26 |
| 7479204 | Method of manufacturing semiconductor substrate and method of evaluating quality of semiconductor substrate | Morimasa Miyazaki, Takafumi Kitamura, Mihoko Ohira | 2009-01-20 |