Patents per Year
Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9174323 | Combinatorial tool for mechanically-assisted surface polishing and cleaning | Kim Van Berkel, Aaron Francis, Frank C. Ma | 2015-11-03 | $43,000 |
| 9074169 | Lithographic tool in situ clean formulations | Tianniu Chen, Steven M. Bilodeau, Karl E. Boggs, Ping Jiang, Michael B. Korzenski +1 more | 2015-07-07 | |
| 8906709 | Combinatorially variable etching of stacks including two dissimilar materials for etch pit density inspection | Khaled Ahmed, Frank Greer, Zhi-Wen Sun | 2014-12-09 | $262,000 |
| 8852967 | Dissolution rate monitor | — | 2014-10-07 | $198,000 |
| 7056824 | Electronic device manufacture | — | 2006-06-06 |