Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7344589 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Michael W. Russell, Stephen T. Johnston, Daniel J. Vestyck +1 more | 2008-03-18 |
| 7285308 | Chemical vapor deposition of high conductivity, adherent thin films of ruthenium | Bryan C. Hendrix, James Welch, Jeffrey F. Roeder, Chongying Xu, Thomas H. Baum | 2007-10-23 |
| 7022864 | Ethyleneoxide-silane and bridged silane precursors for forming low k films | Alexander Borovik, Chongying Xu, Thomas H. Baum, Jeffrey F. Roeder, Abigail Ebbing +1 more | 2006-04-04 |
| 7012292 | Oxidative top electrode deposition process, and microelectronic device structure | Peter C. Van Buskirk, Stephen T. Johnston, Daniel J. Vestyck, Michael W. Russell | 2006-03-14 |
| 6984417 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Michael W. Russell, Stephen T. Johnston, Daniel J. Vestyck +1 more | 2006-01-10 |
| 6692569 | A-SITE-AND/OR B-SITE-MODIFIED PBZRTIO3 MATERIALS AND (PB, SR, CA, BA, MG) (ZR, TI,NB, TA)O3 FILMS HAVING UTILITY IN FERROELECTRIC RANDOM ACCESS MEMORIES AND HIGH PERFORMANCE THIN FILM MICROACTUATORS | Jeffrey F. Roeder, Ing-Shin Chen, Thomas H. Baum | 2004-02-17 |
| 6514835 | Stress control of thin films by mechanical deformation of wafer substrate | Bryan C. Hendrix, Jeffrey F. Roeder | 2003-02-04 |
| 6511856 | Confinement of E-fields in high density ferroelectric memory device structures | Peter C. Van Buskirk | 2003-01-28 |
| 6346741 | Compositions and structures for chemical mechanical polishing of FeRAM capacitors and method of fabricating FeRAM capacitors using same | Peter C. Van Buskirk, Michael W. Russell, Thomas H. Baum | 2002-02-12 |
| 6342711 | Confinement of E-fields in high density ferroelectric memory device structures | Peter C. Van Buskirk | 2002-01-29 |
| 6316797 | Scalable lead zirconium titanate(PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Michael W. Russell, Stephen T. Johnston, Daniel J. Vestyck +1 more | 2001-11-13 |
| 6312816 | A-site- and/or B-site-modified PbZrTiO3 materials and (Pb, Sr, Ca, Ba, Mg) (Zr, Ti, Nb, Ta)O3 films having utility in ferroelectric random access memories and high performance thin film microactuators | Jeffrey F. Roeder, Ing-Shin Chen, Thomas H. Baum | 2001-11-06 |
| 6156623 | Stress control of thin films by mechanical deformation of wafer substrate | Bryan C. Hendrix, Jeffrey F. Roeder | 2000-12-05 |
| 5972430 | Digital chemical vapor deposition (CVD) method for forming a multi-component oxide layer | Frank Dimeo, Jr., Peter C. Van Buskirk | 1999-10-26 |
| 5882416 | Liquid delivery system, heater apparatus for liquid delivery system, and vaporizer | Peter C. Van Buskirk, Ralph Carl | 1999-03-16 |