Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7022864 | Ethyleneoxide-silane and bridged silane precursors for forming low k films | Alexander Borovik, Chongying Xu, Thomas H. Baum, Steven M. Bilodeau, Jeffrey F. Roeder +1 more | 2006-04-04 |