Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7862857 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Steven M. Bilodeau, Stephen T. Johnston, Daniel J. Vestyck +1 more | 2011-01-04 |
| 7705382 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Steven M. Bilodeau, Stephen T. Johnston, Daniel J. Vestyck +1 more | 2010-04-27 |
| 7344589 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Steven M. Bilodeau, Stephen T. Johnston, Daniel J. Vestyck +1 more | 2008-03-18 |
| 7012292 | Oxidative top electrode deposition process, and microelectronic device structure | Peter C. Van Buskirk, Steven M. Bilodeau, Stephen T. Johnston, Daniel J. Vestyck | 2006-03-14 |
| 6984417 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Steven M. Bilodeau, Stephen T. Johnston, Daniel J. Vestyck +1 more | 2006-01-10 |
| 6699402 | Chemical mechanical polishing compositions for CMP removal of iridium thin films | Peter C. Van Buskirk, Jonathan Wolk, George E. Emond | 2004-03-02 |
| 6395194 | Chemical mechanical polishing compositions, and process for the CMP removal of iridium thin using same | Peter C. Van Buskirk, Jonathan Wolk, George E. Emond | 2002-05-28 |
| 6346741 | Compositions and structures for chemical mechanical polishing of FeRAM capacitors and method of fabricating FeRAM capacitors using same | Peter C. Van Buskirk, Steven M. Bilodeau, Thomas H. Baum | 2002-02-12 |
| 6316797 | Scalable lead zirconium titanate(PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Steven M. Bilodeau, Stephen T. Johnston, Daniel J. Vestyck +1 more | 2001-11-13 |
| 6184550 | Ternary nitride-carbide barrier layers | Peter C. Van Buskirk | 2001-02-06 |
| 6100200 | Sputtering process for the conformal deposition of a metallization or insulating layer | Peter C. Van Buskirk, Daniel J. Vestyck, Scott R. Summerfelt, Theodore S. Moise | 2000-08-08 |