Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7192886 | Method for using additives in the caustic etching of silicon for obtaining improved surface characteristics | Wiltold Paw | 2007-03-20 |
| 6699402 | Chemical mechanical polishing compositions for CMP removal of iridium thin films | Michael W. Russell, Peter C. Van Buskirk, George E. Emond | 2004-03-02 |
| 6395194 | Chemical mechanical polishing compositions, and process for the CMP removal of iridium thin using same | Michael W. Russell, Peter C. Van Buskirk, George E. Emond | 2002-05-28 |