Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161567 | Process chamber pressure control system and method | — | 2018-12-25 |
| 9139425 | Process for manufacturing electro-mechanical systems | — | 2015-09-22 |
| 7862857 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Steven M. Bilodeau, Michael W. Russell, Stephen T. Johnston +1 more | 2011-01-04 |
| 7705382 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Steven M. Bilodeau, Michael W. Russell, Stephen T. Johnston +1 more | 2010-04-27 |
| 7344589 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Steven M. Bilodeau, Michael W. Russell, Stephen T. Johnston +1 more | 2008-03-18 |
| 7022864 | Ethyleneoxide-silane and bridged silane precursors for forming low k films | Alexander Borovik, Chongying Xu, Thomas H. Baum, Steven M. Bilodeau, Jeffrey F. Roeder +1 more | 2006-04-04 |
| 7012292 | Oxidative top electrode deposition process, and microelectronic device structure | Peter C. Van Buskirk, Steven M. Bilodeau, Stephen T. Johnston, Michael W. Russell | 2006-03-14 |
| 6984417 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Steven M. Bilodeau, Michael W. Russell, Stephen T. Johnston +1 more | 2006-01-10 |
| 6316797 | Scalable lead zirconium titanate(PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Jeffrey F. Roeder, Steven M. Bilodeau, Michael W. Russell, Stephen T. Johnston +1 more | 2001-11-13 |
| 6157133 | Metal oxide discharge lamp | Vasgen A. Shamamian, John L. Giuliani, Jr., James E. Butler | 2000-12-05 |
| 6100200 | Sputtering process for the conformal deposition of a metallization or insulating layer | Peter C. Van Buskirk, Michael W. Russell, Scott R. Summerfelt, Theodore S. Moise | 2000-08-08 |