Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8411270 | Monitoring stage alignment and related stage and calibration target | Shahin Zangooie, Lin Zhou, Roger M. Young, Clemente Bottini | 2013-04-02 |
| 7742160 | Determining angle of incidence with respect to workpiece | Clemente Bottini, Roger M. Young, Shahin Zangooie, Lin Zhou | 2010-06-22 |
| 7646491 | Determining azimuth angle of incident beam to wafer | Shahin Zangooie, Roger M. Young, Lin Zhou, Clemente Bottini | 2010-01-12 |
| 7542136 | Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput | Shahin Zangooie, Lin Zhou, Roger M. Young, Clemente Bottini, Robert J. Foster | 2009-06-02 |
| 7477365 | Optical spot geometric parameter determination using calibration targets | Shahin Zangooie, Roger M. Young, Lin Zhou, Clemente Bottini | 2009-01-13 |
| 6325696 | Piezo-actuated CMP carrier | Karl E. Boggs, Kenneth M. Davis, William Francis Landers, Michael F. Lofaro, Adam D. Ticknor | 2001-12-04 |