Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8736275 | Alignment correction system and method of use | Robert J. Foster, Lin Zhou, Shahin Zangooie, Roger M. Young | 2014-05-27 |
| 8680871 | Alignment correction system and method of use | Robert J. Foster, Lin Zhou, Shahin Zangooie, Roger M. Young | 2014-03-25 |
| 8451008 | Alignment correction system and method of use | Robert J. Foster, Lin Zhou, Shahin Zangodie, Roger M. Young | 2013-05-28 |
| 8411270 | Monitoring stage alignment and related stage and calibration target | Shahin Zangooie, Lin Zhou, Roger M. Young, Ronald D. Fiege | 2013-04-02 |
| 7742160 | Determining angle of incidence with respect to workpiece | Ronald D. Fiege, Roger M. Young, Shahin Zangooie, Lin Zhou | 2010-06-22 |
| 7646491 | Determining azimuth angle of incident beam to wafer | Shahin Zangooie, Roger M. Young, Lin Zhou, Ronald D. Fiege | 2010-01-12 |
| 7592817 | Alignment correction system and method of use | Robert J. Foster, Lin Zhou, Shahin Zangooie, Roger M. Young | 2009-09-22 |
| 7542136 | Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput | Shahin Zangooie, Lin Zhou, Roger M. Young, Robert J. Foster, Ronald D. Fiege | 2009-06-02 |
| 7477365 | Optical spot geometric parameter determination using calibration targets | Shahin Zangooie, Roger M. Young, Lin Zhou, Ronald D. Fiege | 2009-01-13 |