Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9652729 | Metrology management | William K. Hoffman, Timothy L. Holmes, Jonathan Levy, Christopher E. Pepe, Darryl D. Restaino +1 more | 2017-05-16 |
| 8736275 | Alignment correction system and method of use | Robert J. Foster, Lin Zhou, Shahin Zangooie, Clemente Bottini | 2014-05-27 |
| 8680871 | Alignment correction system and method of use | Robert J. Foster, Lin Zhou, Shahin Zangooie, Clemente Bottini | 2014-03-25 |
| 8451008 | Alignment correction system and method of use | Robert J. Foster, Lin Zhou, Shahin Zangodie, Clemente Bottini | 2013-05-28 |
| 8411270 | Monitoring stage alignment and related stage and calibration target | Shahin Zangooie, Lin Zhou, Clemente Bottini, Ronald D. Fiege | 2013-04-02 |
| 7937177 | Manufacturing work in process management system | Jeffrey P. Gifford | 2011-05-03 |
| 7853345 | Offset determination method for measurement system matching | Andrew Brendler, Danielle R. Chianese, Susan M. Jankovsky | 2010-12-14 |
| 7742160 | Determining angle of incidence with respect to workpiece | Clemente Bottini, Ronald D. Fiege, Shahin Zangooie, Lin Zhou | 2010-06-22 |
| 7646491 | Determining azimuth angle of incident beam to wafer | Shahin Zangooie, Lin Zhou, Clemente Bottini, Ronald D. Fiege | 2010-01-12 |
| 7592817 | Alignment correction system and method of use | Robert J. Foster, Lin Zhou, Shahin Zangooie, Clemente Bottini | 2009-09-22 |
| 7542136 | Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput | Shahin Zangooie, Lin Zhou, Clemente Bottini, Robert J. Foster, Ronald D. Fiege | 2009-06-02 |
| 7477365 | Optical spot geometric parameter determination using calibration targets | Shahin Zangooie, Lin Zhou, Clemente Bottini, Ronald D. Fiege | 2009-01-13 |
| 7318206 | Offset determination for measurement system matching | Andrew Brendler, Danielle R. Chianese, Susan M. Jankovsky | 2008-01-08 |
| 7248936 | Automated tool recipe verification and correction | Timothy L. Holmes, Susan M. Cianfrani | 2007-07-24 |
| 6303397 | Method for benchmarking thin film measurement tools | Yuanning Chen, Linette Lozada, Yi Ma | 2001-10-16 |