| 9652729 |
Metrology management |
William K. Hoffman, Timothy L. Holmes, Jonathan Levy, Christopher E. Pepe, Darryl D. Restaino +1 more |
2017-05-16 |
| 8736275 |
Alignment correction system and method of use |
Robert J. Foster, Lin Zhou, Shahin Zangooie, Clemente Bottini |
2014-05-27 |
| 8680871 |
Alignment correction system and method of use |
Robert J. Foster, Lin Zhou, Shahin Zangooie, Clemente Bottini |
2014-03-25 |
| 8451008 |
Alignment correction system and method of use |
Robert J. Foster, Lin Zhou, Shahin Zangodie, Clemente Bottini |
2013-05-28 |
| 8411270 |
Monitoring stage alignment and related stage and calibration target |
Shahin Zangooie, Lin Zhou, Clemente Bottini, Ronald D. Fiege |
2013-04-02 |
| 7937177 |
Manufacturing work in process management system |
Jeffrey P. Gifford |
2011-05-03 |
| 7853345 |
Offset determination method for measurement system matching |
Andrew Brendler, Danielle R. Chianese, Susan M. Jankovsky |
2010-12-14 |
| 7742160 |
Determining angle of incidence with respect to workpiece |
Clemente Bottini, Ronald D. Fiege, Shahin Zangooie, Lin Zhou |
2010-06-22 |
| 7646491 |
Determining azimuth angle of incident beam to wafer |
Shahin Zangooie, Lin Zhou, Clemente Bottini, Ronald D. Fiege |
2010-01-12 |
| 7592817 |
Alignment correction system and method of use |
Robert J. Foster, Lin Zhou, Shahin Zangooie, Clemente Bottini |
2009-09-22 |
| 7542136 |
Flipping stage arrangement for reduced wafer contamination cross section and improved measurement accuracy and throughput |
Shahin Zangooie, Lin Zhou, Clemente Bottini, Robert J. Foster, Ronald D. Fiege |
2009-06-02 |
| 7477365 |
Optical spot geometric parameter determination using calibration targets |
Shahin Zangooie, Lin Zhou, Clemente Bottini, Ronald D. Fiege |
2009-01-13 |
| 7318206 |
Offset determination for measurement system matching |
Andrew Brendler, Danielle R. Chianese, Susan M. Jankovsky |
2008-01-08 |
| 7248936 |
Automated tool recipe verification and correction |
Timothy L. Holmes, Susan M. Cianfrani |
2007-07-24 |
| 6303397 |
Method for benchmarking thin film measurement tools |
Yuanning Chen, Linette Lozada, Yi Ma |
2001-10-16 |
